Browsing Presentations by imec author "f17ec27cb1261480da9180483792955b37b77a2c"
Now showing items 1-12 of 12
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Applications of dynamic surface annealing for high-performance Si and Ge based MOS devices
Rosseel, Erik; Everaert, Jean-Luc; Hikavyy, Andriy; Witters, Liesbeth; Mitard, Jerome; Vandervorst, Wilfried (2011) -
Epitaxial growth of (Si)GeSn source-drain layers for advanced gate all around devices
Loo, Roger; Vohra, Anurag; Porret, Clément; Hikavyy, Andriy; Rosseel, Erik; Schaekers, Marc; Capogreco, Elena; Shimura, Yosuke; Kohen, David; Tolle, John; Vandervorst, Wilfried (2019) -
Epitaxial growth schemes for fin and Gate All Around devices
Loo, Roger; Hikavyy, Andriy; Rosseel, Erik; Porret, Clément; Vohra, Anurag; Langer, Robert (2017) -
Epitaxial growth schemes for logic devices
Loo, Roger; Hikavyy, Andriy; Rosseel, Erik; Porret, Clément; Vohra, Anurag; Langer, Robert (2018) -
Epitaxial Si, SiGe and Ge for high-performance devices
Loo, Roger; Hikavyy, Andriy; Vincent, Benjamin; Wang, Gang; Vanherle, Wendy; Gencarelli, Federica; Nguyen, Duy; Rosseel, Erik; Souriau, Laurent; Rondas, Dirk; Dekoster, Johan; Caymax, Matty (2010) -
Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growth
Loo, Roger; Wang, Gang; Souriau, Laurent; Hikavyy, Andriy; Takeuchi, Shotaro; Caymax, Matty (2009) -
Growth of high Ge content SiGe on (110) oriented Si wafers
Hikavyy, Andriy; Vanherle, Wendy; Dekoster, Johan; Bender, Hugo; Moussa, Alain; Witters, Liesbeth; Hoffman, T.; Loo, Roger (2011) -
High accuracy moisture measurements at high temperature and low pressure: a comparative analysis of the ASM Epsilon3200 and the Epsilon2000
Leys, Frederik; Hikavyy, Andriy; De Vos, Brecht; Loo, Roger; Caymax, Matty (2007) -
In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
Nguyen, Duy; Loo, Roger; Hikavyy, Andriy; Van Daele, Benny; Ryan, Paul; Wormington, Paul; Hopkins, John (2007) -
Low temperature epitaxy and the importance of moisture control
Leys, Frederik; Hikavyy, Andriy; Machkaoutsan, Vladimir; De Vos, Brecht; Geenen, Luc; Van Daele, Benny; Loo, Roger; Caymax, Matty (2007) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Porret, Clément; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Huang, Yan-Hua; Tirrito, Matteo; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Langer, Robert; Loo, Roger (2019)