Browsing Presentations by open access status "Not OA relevant"

Al3Sc thin films as alternative interconnect metallization

Soulie, Jean-Philippe; Adelmann, Christoph; Swerts, Johan; Tokei, Zsolt (2022-03-28)

Design of High-efficiency Visible-Spectrum SiN Grating Coupler Based on Amorphous Silicon Overlay

Ebrahimipour, Mohammadjavad; Yurtsever, Gunay; Van Dorpe, Pol (2022-07-24)

Disruptive EUV Material Characterization in imec's AttoLab

Dorney, Kevin (2023-06-04)

Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

Montero Alvarez, Daniel; Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Nie, Jiuyuan; Yang, Jialing; Schleicher, Filip; Mclaughlin, Kevin; Versluijs, Janko; Lazzarino, Frederic; Park, Seongho; Tokei, Zsolt (2022-11-10)

Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors

Dupuy, Emmanuel; Capogreco, Elena; Dentoni Litta, Eugenio; Tao, Zheng; Sebaai, Farid; Spessot, Alessio; Horiguchi, Naoto (2022-09-20)

Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography

Holzmeier, Fabian; Dorney, Kevin; Witting Larsen, Esben; Nuytten, Thomas; Singh, Dhirendra; van Setten, Michiel; Vanelderen, Pieter; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Bottcher, Stefan; Dyachenko, Oleksiy; Kremzow, Raimund; Wietstruk, Marko; Pourtois, Geoffrey; van der Heide, Paul; Petersen, John (2021-02-22)

Limitation of EUV single exposure on DRAM applications: learning and challenges

Liu, Shih-hsiang; Dardani, Zoi; Zuurbier, Nadia; Dhagat, Parul; Wang, Erik; Fallica, Roberto (2022-06-15)

Monolithic Integration of Thin Film Photodiode with CMOS Technology for Infrared Imaging Applications

Li, Yunlong; Malinowski, Pawel; Georgitzikis, Epimitheas; Pejovic, Vladimir; Lee, Jiwon; Lim, Myung jin; Mao, Ming; Moreno Hagelsieb, Luis; Lieberman, Itai; Cheyns, David; Sabuncuoglu Tezcan, Deniz (2021-03)

Plasma etch challenges and processing optimization in spin logic device fabrication

Canvel, Yann; Souriau, Laurent; Wan, Danny; Trovato, Anna; Thiam, Arame; Tsvetanova, Diana; Carpenter, Robert; Raymenants, Eline; Asselberghs, Inge; Lazzarino, Frederic; Couet, Sebastien; Kar, Gouri Sankar; Nguyen, Van Dai (2022-11-08)

RBS applied to 3D nanostructures

Claessens, Niels; Couture, Pierre; England, Jonathan; Delabie, Annelies; Bogdanowicz, Janusz; Vantomme, Andre; Vandervorst, Wilfried; Meersschaut, Johan (2022-07-17)

Secondary electron distribution and photosensitivity performance of resists for extreme ultraviolet (EUV)

Rezvani, Javid; Tchoudinov, Georghii; Nannarone, Stefano; Fallica, Roberto (2022-03-17)

Twisted Extreme Nonlinear Optics: Generation of Structured Attosecond EUV Beams and Their Applications for Industrial Spectro-Microscopies

Dorney, Kevin (2023-07-03)