imec Institutional Repository Browsing {{ collection }} by Author "Bailey, P."

Publication

Characterization of low energy (2-5keV) implantation into Si

Collart, E.J.

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Kirkwood, D.

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Vandenberg, J.A.

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Werner, M.

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Vandervorst, Wilfried

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Brijs, Bert

Oral presentation

2002, Ion Implantation Conference

Publication

Damage accumulation and dopant migration during shallow As and Sb implantation into Si

Werner, M.

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van den Berg, J.A.

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Armour, D.G.

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Vandervorst, Wilfried

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Collart, E.H.J.

Journal article

2004, Nuclear Instruments & Methods in Physics Research B, 216, p.67-74

Publication

High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

van den Berg, J.A.

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Armour, D.G.

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Werner, M.

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Whelan, S.

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Vandervorst, Wilfried

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Clarysse, Trudo

Proceedings paper

2002, Proceedings 14th International Conference on Ion Implantation Technology Conference, 22/09/2002, p.597-600

Publication

High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.

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Reading, M.A.

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Parisini, A.

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Kolbe, M.

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Beckhoff, B.

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Ladas, S.

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Petrik, P.

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1994

Publication

High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.

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Reading, M. A.

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Parisini, A.

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Kolbe, M.

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Beckhoff, B.

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Ladas, S.

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Fried, M.

Proceedings paper

2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6, 4/10/2009, p.349-361

Publication

High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Reading, M. A.

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van den Berg, J. A.

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Zalm, P. C.

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Armour, D. G.

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Bailey, P.

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Noakes, T. C. Q.

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Parisini, A.

Journal article

2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C65-C1C70

Publication

High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Van den berg, J.

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Reading, M.A.

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Armour, D.G.

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Bailey, P.

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Noakes, T.

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Conard, Thierry

Meeting abstract

2009, 5th International Workshop on High-Resolution Depth Profiling, 15/11/2009

Publication

High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)

van den Berg, J.A.

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Reading, M.A.

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Armour, D.G>

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Bailey, P.

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Noakes, T.C.Q.

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Conard, Thierry

Proceedings paper

2009, 19th Ion Beam Analysis Conference - IBA, 7/09/2009

Publication

Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

van den Berg, J.A.

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Werner, M.

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Armour, D.G.

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Vandervorst, Wilfried

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Clarysse, Trudo

Meeting abstract

2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.446

Publication

Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition

Popovici, Mihaela Ioana

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Redolfi, Augusto

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Aoulaiche, Marc

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van den Berg, J.A.

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Douhard, Bastien

Journal article

2015, Microelectronic Engineering, 147, p.108-112

Browsing by Author "Bailey, P."