Browsing by Author "Dewulf, Daan"
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Publication Alternative high-k dielectrics for semiconductor applications
Journal article2009, Journal of Vacuum Science and Technology B, (27) 1, p.209-213Publication Alternative high-k dielectrics for semiconductor applications
Oral presentation2008, 15th Workshop on Dielectrics in Microelectronics - WODIMPublication Aqueous chemical solution deposition of LuFeO3 thin films in view of energy storage applications
;Gielis, Sven ;Peys, Nick ;Dewulf, Daan ;De Dobbelaere, C. ;Pavlovic, N. ;Damm, H.Oral presentation2011, E-MRS Fall MeetingPublication Atomic layer deposition of gadolinium aluminate layers using Gd(iPrCp)3, TMA, and O3 or H2O
Journal article2010, Chemical Vapor Deposition, (16) 4_6, p.170-178Publication Atomic layer deposition of Gd-doped HfO2 thin films
Journal article2010, Journal of the Electrochemical Society, (157) 4, p.G105-G110Publication Development of an aqueous vanadium precursor for the chemical solution deposition of V2O5 films
;Peys, Nick ;Dewulf, Daan ;Schellens, Kevin; ; ; Oral presentation2010, 10de Vlaams Jongerencongres van de ChemiePublication Dielectric Nb2O5 and niobates: synthesis, material properties and consequences for electrical properties
Proceedings paper2010, Electroceramics XII, 13/06/2010Publication Gadolinium-niobates and -tantalates: amorphous high-k materials by aqueous CSD
Journal article2012-04, Journal of the Electrochemical Society, (159) 6, p.G75-G79Publication Gd(III)-Nb(V)-oxides: high-k materials screened by aqueous CSD
Oral presentation2010, Electroceramics XIIPublication Insight in Gd(III)-Nb(V)-oxides: high-k materials screened by aqueous CSD
;Dewulf, Daan; ; ; ;Mullens, JulesOral presentation2010, Electroceramics XIIPublication Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition
Journal article2011, Microelectronic Engineering, (88) 7, p.1338-1341Publication Properties of ultrathin high permittivity NbTaO films prepared by aqueous chemical solution deposition
Journal article2010, Journal of the Electrochemical Society, (157) 1, p.G13-G19Publication Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping
Journal article2011, Applied Physics Letters, (98) 10, p.102904Publication Transparent conducting oxide films of group V doped titania prepared by aqueous chemical solution deposition
Journal article2014, Thin Solid Films, 555, p.33-38Publication V6O13 films by control of the oxidation state from aqueous precursor to crystalline phase
;Peys, Nick ;Ling, Yun ;Dewulf, Daan ;Gielis, Sven ;De Dobbelaere, ChristopherCuypers, DanielJournal article2013, Dalton Transactions, (42) 4, p.959-968