Browsing by Author "Hellemans, L."
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Publication A detailed study of SCM on cross-sectional and beveled junctions
Meeting abstract2001, 6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ, 22/04/2001, p.160Publication A semi-quantitative method for studying photoresist stripping
Proceedings paper1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.581-586Publication Application of SCM to process development of novel devices
Proceedings paper2003, Characterization and Metrology for ULSI Technology, 24/03/2003, p.272-277Publication Assessing the performance of two-dimensional dopant profiling techniques
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Assessing the performance of two-dimensional dopant profiling techniques
Journal article2004, Journal of Vacuum Science and Technology, (22) 1, p.385-393Publication Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
Journal article1994, Appl. Phys. Lett., 64, p.354-356Publication Carrier Profile Determination in Device Structures using AFM-Based Methods
Oral presentation1995, International Workshop on Semiconductor Characterization: Present Status and Needs; January 1995; Gaithersburg, USA.Publication Characterization of a point-contact on silicon using force microscopy-supported resistance measurements
Journal article1995, Appl. Phys. Lett., (66) 12, p.1530-2Publication Characterization of conductive probes for atomic force microscopy
Proceedings paper1999, Design, Test, and Microfabrication of MEMS and MOEMS; 30 March - 1 April 1999; Paris, France., 30/03/1999, p.1168-1179Publication Characterization of different tip materials for SCM
Meeting abstract2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.213Publication Characterization of vertical RESURF diodes using scanning probe microscopy
Journal article2003, Materials Science and Engineering B, (102) 1_3, p.143-147Publication Characterization of vertical resurf diodes using scanning probe microsopy
Oral presentation2002, E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and DevicesPublication Combining TOF-SIMS with XPS to quantify organic surface coverages
Proceedings paper2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.821-824Publication Cross-sectional nano-spreading resistance profiling
Journal article1998, Journal of Vacuum Science and Technology B, (16) 1, p.355-361Publication Cross-sectional nano-srp dopant profiling
Proceedings paper1997, 4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles, 6/04/1997, p.56.1-56.1Publication Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Journal article2002, Journal of Vacuum Science & Technology B, (20) 2, p.741-746Publication Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
Journal article1996, Scanning Microscopy, (10) 4, p.937-945Publication Evaluating probes for "electrical" atomic force microscopy
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427Publication Evaluating probes for "electrical" atomic force microscopy
Proceedings paper1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436Publication Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Oral presentation1994, American Vacuum Society Meeting; October 24-28, 1994; Denver, USA.
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