Browsing by Author "Houssiau, L."
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Publication Cesium/xenon dual beam depth profiling with TOF-SIMS: measurement and modeling of M+, MCs+, and M2Cs2+ yields
Proceedings paper2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and Related Topics - SIMS XIV, 14/09/2003, p.749-753Publication Cesium/xenon dual beam depth profiling with TOF-SIMS: measurement and modeling of M+, MCs+, and MCS2)-C-2 (+) yields
Journal article2004, Applied Surface Science, 231-232, p.749-753Publication Characterization of ultrathin high-k HfO2 layers grown on silicon: influence of the deposition parameters and interfacial layer
Oral presentation2004, 16th International Vacuum Congress - IVC-16Publication High resolution depth profiling of future gate dielectric materials
;Bergmaier, A. ;Dollinger, G. ;Görgens, L. ;Neumaier, P.; ;Brijs, BertOral presentation2003, E-MRS Spring Meeting Symposium I: Functional Metal-Oxides-Semiconductor StructuresPublication Interfacial chemistry at high-k oxide layers on pretreated silicon wafers: XPS and TOF-SIMS study
Oral presentation2004, 31st Conference on the Physics and Chemistry of Semiconductor InterfacesPublication Multitechnique characterisation of Al203 thin layers deposited on SiO2/Si surface by atomic layer chemical vapour deposition
Proceedings paper2003, AVS 4th International Conference on Microelectronics and Interfaces - ICMI, 3/03/2003, p.36-38Publication Physical characterization of mixed HfAlOx layers by complementary analysis techniques
Journal article2004, Materials Science and Engineering B, 109, p.60-63Publication Physical characterization of thin HfO2 layers by the combined analysis with complementary techniques
Proceedings paper2003, Analytical Techniques for Semiconductor Materials and Processes, 27/04/2003, p.223-232Publication Purity of epitaxial cubic BoronNitride films on (001) Diamond - A prerequisite for their doping
;Yin, H. ;Boyen, H.G. ;Ziemann, P. ;Dohuard, B. ;Houssiau, L. ;Renaux, F. ;Hecq, M.Bittencourt, C.Journal article2008, Diamond and Related Materials, (17) 3, p.276-282Publication Tof-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides
Oral presentation2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIVPublication ToF-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides
Journal article2004, Applied Surface Science, 231-232, p.585-589