Browsing by Author "Kambham, Ajay Kumar"
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Publication 3D site specific sample preparation and analysis of 3D devices (Finfets) by atom probe tomography
Oral presentation2012, 53rd International Field Emission Symposium - IFESPublication 3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
Journal article2013, Ultramicroscopy, (132) 1, p.69-69Publication 3D-Atomprobe : facts, artifacts and applications in semiconductors
Proceedings paper2010, The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University - SISS-12, 10/06/2010Publication 3D-carrier profiling in FinFETs using scanning spreading resistance microscopy
Proceedings paper2011, IEEE International Electron Devices Meeting - IEDM, 5/12/2011, p.119-122Publication Application of atom probe tomography to epitaxial layers
Proceedings paper2013, 8th International Conference on Silicon Epitaxy and Heterostructures - ICSI-8, 2/06/2013, p.79-80Publication Atom probe analysis of a 3D-finfet with high-k metal gate
Journal article2011, Ultramicroscopy, (111) 6, p.530-534Publication Atom probe for FinFET dopant characterization
Meeting abstract2010, 52nd International Field Emission Symposium - IFES, 5/07/2010Publication Atom probe tomography for 3D-dopant analysis in FinFET devices
Proceedings paper2012, Symposium on VLSI Technology - VLSIT, 12/06/2012, p.77-78Publication Atom probe tomography for advanced semiconductor metrology
Meeting abstract2012, International Field Emission Symposium- IFES, 21/05/2012Publication Atom-probe for arsenic implant doped FinFET characterization
Oral presentation2012, 53rd International Field Emmission SymposiumPublication Atom-probe-tomographic studies on silicon-based semiconductor devices
Publication Atomic insight into relaxation mechanism of Ge(1-x)Sn(x) using atom probe tomography
Meeting abstract2012, E-MRS Spring Meeting Symposium A: Advanced Silicon Materials Research for Electronic and Photovoltaic Applications III, 14/05/2012Publication Atomic insight of Ge(1-x)Sn(x) using atom probe tomography
Proceedings paper2012, 53rd International Field Emission Symposium - IFES, 21/05/2012Publication Atomic scale characterization of 3D structures (FinFETs) with atom probe tomography
Kambham, Ajay KumarPHD thesis2014-03Publication Counting dopants/atoms in 2D/3D nanoscale structures
Oral presentation2010, The X International Conference on Nanostructured Materials - NANO-2010Publication Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel
Proceedings paper2012-09, International Conference on Solid State Devices and Materials - SSDM, 25/09/2012Publication Dopant and carrier profiling for 3D-device architectures
Proceedings paper2011, International Workshop on Junction Technology, 7/06/2011Publication Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution
Proceedings paper2010, IEEE Symposium on VLSI Technology, 15/06/2010, p.195-196Publication Dopant/carrier profiling for 3D-structures
Journal article2014, Physica Status Solidi C, (11) 1, p.121-129Publication Dopant/carrier profiling in nanostructures
Proceedings paper2010, International Conference on Solid State Devices and Materials - SSDM, 22/09/2010, p.992-993