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Browsing by Author "Kohen, David"

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    Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6

    Vohra, Anurag  
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    Loo, Roger  
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    Kohen, David
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    Margetis, Joe
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    Tolle, John
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    Stange, Daniela
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    Buca, Dan
    Meeting abstract
    2016-11, JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration", 24/11/2016, p.20-21
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    Electrical properties of III-V/oxide interfaces

    Brammertz, Guy  
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    Lin, H.C.
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    Martens, Koen  
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    Alian, AliReza  
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    Merckling, Clement  
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    Penaud, Julien
    Proceedings paper
    2009, Graphene and Emerging Materials for Post-CMOS Applications, 24/05/2009, p.375-386
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    Electrical properties of III-V/oxide interfaces

    Brammertz, Guy  
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    Lin, Dennis  
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    Martens, Koen  
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    Alian, AliReza  
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    Merckling, Clement  
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    Penaud, Julien
    Meeting abstract
    2009, 215th Electrochemical Society Spring Meeting, 24/05/2009, p.1337
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    Enhanced B doping in CVD-grown GeSn:B using B $d-doping layers

    Kohen, David
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    Vohra, Anurag  
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    Loo, Roger  
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    Vandervorst, Wilfried  
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    Bhargava, Nupur
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    Margetis, Joe
    Journal article
    2018-02, Journal of Crystal Growth, 483, p.285-290
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    Epitaxial GeSn: Impact of process conditions on material quality

    Loo, Roger  
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    Shimura, Yosuke
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    Ike, Shinichi
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    Vohra, Anurag  
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    Stoica, Toma
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    Stange, Daniela
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    Buca, Dan
    Oral presentation
    2018, eMRS 2018 Fall Meeting, Symposium U: Monolithic and Heterogeneous Integration of Advanced Materials & Devices on Silicon
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    Epitaxial GeSn: impact of process conditions on material quality

    Loo, Roger  
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    Shimura, Yosuke
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    Ike, Shinichi
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    Vohra, Anurag  
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    Stoica, Toma
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    Buca, Dan
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    Kohen, David
    Meeting abstract
    2018-05, Joint ISTDM/ICSI Conference, 27/05/2018, p.195-196
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    Epitaxial GeSn: Impact of process conditions on material quality

    Loo, Roger  
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    Shimura, Yosuke
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    Ike, Shinichi
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    Vohra, Anurag  
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    Stoica, Toma
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    Stange, Daniela
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    Buca, Dan
    Journal article
    2018, Semiconductor Science and Technology, (33) 11, p.114010
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    Epitaxial growth of (Si)GeSn source-drain layers for advanced gate all around devices

    Loo, Roger  
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    Vohra, Anurag  
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    Porret, Clément  
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    Hikavyy, Andriy  
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    Rosseel, Erik  
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    Schaekers, Marc  
    Oral presentation
    2019, talk at Nagoya University
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    Epitaxial growth of (Si)GeSn source/drain layers for advanced gate all around devices

    Loo, Roger  
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    Vohra, Anurag  
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    Porret, Clément  
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    Hikavyy, Andriy  
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    Rosseel, Erik  
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    Schaekers, Marc  
    Meeting abstract
    2019-09, 2019 Compound Semiconductor Week (CSW), 19/05/2019, p.1-2
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    Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials

    Margetis, Joe
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    Kohen, David
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    Porret, Clément  
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    Petersen Barbosa Lima, Lucas  
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    Khazaka, Rami  
    Meeting abstract
    2019, 2nd Joint ISTDM / ICSI 2019 Conference, 2/06/2019, p.214-215
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    Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials

    Margetis, Joe
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    Kohen, David
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    Porret, Clément  
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    Petersen Barbosa Lima, Lucas  
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    Khazaka, Rami  
    Proceedings paper
    2019-10, 2nd Joint ISTDM / ICSI 2019 Conference, 2/06/2019, p.7-10
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    Epitaxial growth schemes for fin and Gate All Around devices

    Loo, Roger  
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    Hikavyy, Andriy  
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    Rosseel, Erik  
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    Porret, Clément  
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    Vohra, Anurag  
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    Kohen, David
    Meeting abstract
    2018, 11th International WorkShop on New Group IV Semiconductor Nanoelectronics, 23/02/2018
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    Epitaxial growth schemes for Fin and Gate-All-Around devices

    Loo, Roger  
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    Hikavyy, Andriy  
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    Rosseel, Erik  
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    Porret, Clément  
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    Vohra, Anurag  
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    Kohen, David
    Meeting abstract
    2018-05, 1st Joint ISTDM / ICSI 2018 Conference, 27/05/2018, p.65-66
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    Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy

    Margetis, Joe
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    Mosleh, Aboozar
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    Ghetmiri, Seyed Amir
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    Al-Kabi, Sattar
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    Dou, Wei
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    Du, Wei
    Journal article
    2017, Material Science in Semiconcductor Processing, 70, p.38-43
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    Ga-doped Ge and [B + Ga] Co-doped SiGe epitaxial source-drain for Sub-7 nm logic devices

    Porret, Clément  
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    Margetis, Joe
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    Tolle, John
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    Sammak, Amir
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    Scappucci, Giordano
    Meeting abstract
    2018, 1st Joint ISTDM / ICSI 2018 Conference, 27/05/2018
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    Gallium-doped SiGe and Ge via MO-RPCVD epitaxy

    Margetis, Joe
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    Porret, Clément  
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    Kumar, Raj
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    Petersen Barbosa Lima, Lucas  
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    Kohen, David
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    Loo, Roger  
    Meeting abstract
    2018-05, 1st Joint ISTDM/ICSI conference, 27/05/2018, p.143-144
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    Ge1-xSnx and SiyGe1-x-ySnx epitaxy on a commercial CVD reactor

    Margetis, Joe
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    Mosleh, Aboozar
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    Ghetmiri, Seyed Amir
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    Bhargava, Nupur
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    Yu, Shui-Qing
    Meeting abstract
    2016-05, 7th International Symposium on Control of Semiconductor Interfaces / International Si Technology and Device Meeting, 7/06/2016, p.4-5
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    Ge:B and GeSn:B low temperature selective epitaxial growth schemes for source/drain layers in Ge pMOS devices

    Vohra, Anurag  
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    Porret, Clément  
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    Kohen, David
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    Folkersma, Steven  
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    Bogdanowicz, Janusz  
    Meeting abstract
    2019, 2019 E-MRS Fall Meeting and Exhibit, Symposium B: Integration of advanced materials on silicon: from classical to quantum applic, 16/09/2019
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    Ge:B and GeSn:B low temperature selective epitaxial growth schemes for source/drain layers in Ge pMOS devices

    Vohra, Anurag  
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    Porret, Clément  
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    Kohen, David
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    Folkersma, Steven  
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    Bogdanowicz, Janusz  
    Proceedings paper
    2018, 50th Solid State Devices and Materials Conference - SSDM, 9/09/2018, p.179-180
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    Highly doped low-temperature Si:P growth for source/drain formation in advanced Si nFETs

    Rosseel, Erik  
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    Kohen, David
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    Hikavyy, Andriy  
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    Porret, Clément  
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    Loo, Roger  
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    Tolle, John
    Meeting abstract
    2017, e-MRS Fall Meeting, 18/09/2017, p.M6.4
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