Browsing by Author "Niklaus, Frank"
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Publication Building large-scale programmable photonic circuits using silicon photonic MEMS
Proceedings paper2020, OSA Advanced Photonics Congress, 13/07/2020, p.PsTh1F.1Publication Development of Electrical and Optical Packaging for Silicon Photonic MEMS
Proceedings paper2024, 2024 IEEE Photonics Conference, NOV 10-14, 2024Publication Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process
Publication Integrated silicon photonic MEMS
Publication MORPHIC: MEMS enhanced silicon photonics for programmable photonics
Proceedings paper2022, Conference on Integrated Photonics Platforms II, APR 03-MAY 20, 2022, p.Art. 121480HPublication MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS
Proceedings paper2020, Silicon Photonics XV, 1/02/2020, p.11285Publication Programmable silicon photonic circuits powered by MEMS
Proceedings paper2022, Conference on Smart Photonic and Optoelectronic Integrated Circuits at SPIE OPTO Conference, JAN 22-FEB 28, 2022, p.Art. 1200509Publication Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics
Publication Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits
Publication Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform
Proceedings paper2021, 17th IEEE International Conference on Group IV Photonics (GFP), DEC 07-10, 2021Publication Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
Publication Wafer-level hermetically sealed silicon photonic MEMS
Publication Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS