Browsing by Author "Petersen, Dirch H."
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Publication 3 omega correction method for eliminating resistance measurement error due to Joule heating
Publication Advanced carrier depth profiling on Si and Ge with micro four-point probe
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.317-321Publication Advanced characterization of carrier profiles in germanium using micro-machined contact probes
Proceedings paper2012, Ion Implantation Technology. Proceedings of the 19th International Conference, 25/06/2012, p.167-170Publication Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Journal article2016-09, ACS Applied Materials & Interfaces, (9) 39, p.26119-26125Publication Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
Publication Electrical characterization of InGaAs ultra-shallow junctions
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Electrical characterization of InGaAs ultra-shallow junctions
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C41-C1C47Publication Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Publication Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probe
Journal article2024, MEASUREMENT SCIENCE AND TECHNOLOGY, (35) 6, p.Art. 066012Publication Towards carrier profiling in nanometer-wide Si fins with micro four-point probe
Proceedings paper2018, 2018 22nd International Conference on Ion Implantation Technology (IIT), 16/09/2018, p.1-3