Browsing by Author "Roebben, G."
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Publication Characterization of nano-laminate structure using grazing incidence XRD and ATR-FTIR
; ; ; ; Roebben, G.Proceedings paper2003, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 27/04/2003, p.252-259Publication Crystallisation and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
Proceedings paper2002, Euro Ceramics VII, 9/09/2001, p.1285-1288Publication Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
Oral presentation2001, 7th European Ceramic Society; 9-13 September 2001; Brugge, Belgium.Publication Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Oral presentation2001, Symposium Q of the E-MRS Spring Meeting 2001: High-k Gate Dielectrics; June 5-8, 2001; Strasbourg, France.Publication High temperature grazing incidence XRD study on in-situ crystallization in ultra-thin oxide films
Oral presentation2000, 11th Workshop on Dielectrics in Microelectronics; 13-15 November 2000; Munich, Germany.Publication In situ crystallisation in ZrO2 thin films during high temperature X-ray diffraction
Journal article2001, Microelectronics Reliability, (41) 7, p.995-998Publication In-situ high temperature study of ceramics and ceramic ultra-thin films using a X-ray diffractometer with a parabolic multilayer mirror
Proceedings paper2002, Euro Ceramics VII, Pt 1-3, 9/09/2001, p.775-778Publication In-situ high temperature study of ceramics and ceramic ultra-thin films using a X-ray diffractometer with a parabolic multilayer mirror
Oral presentation2001, 7th European Ceramic Society; 9-13 September 2001; Brugge, Belgium.Publication Miscibility of amorphous ZrO2-Al2O3 binary alloy
Journal article2002, Applied Physics Letters, (80) 13, p.2374-2376Publication Stabilization of amorphous structures in ALCVD high-k oxide layers
Oral presentation2001, IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference onPublication Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEM
; ; ; Oral presentation2002, E-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and DevicesPublication Thermal stability of high k layers
Proceedings paper2003, Novel Materials and Processes for Advanced CMOS, 2/12/2002, p.9-14Publication Thermostability of amorphous zirconium aluminate high-K layers
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