Browsing by Author "Tillocher, Thomas"

Cryoetching processes applied to ULK material

Damage free cryogenic etching of porous organosilica ultralow-k film

Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C

Low damage cryoetching of low-K materials

Low damage cryogenic etching of porous organosilicate low-k materials using SF6/O2/SiF4

Low-k integration: Gas screening for cryogenic etching and damage mitigation

Low-k material cryoetch using high boiling point organic compounds to reduce plasma induced damage

Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics