Browsing by Author "Uedono, Akira"

Characterization of extreme Si thinning proces for wafer-to-wafer stacking

Characterization of porous low-k dielectric films by using positron annihilation

Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams

Defect identification in bonding surface layer by positron annihilation spectroscopy

Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material

Exploring Bonding Mechanism of SiCN for Hybrid Bonding

Influence of Si wafer thinning processes on (Sub)surface defects

Interfacial Conductivity Enhancement and Pore Confinement Conductivity-Lowering Behavior inside the Nanopores of Solid Silica-gel Nanocomposite Electrolytes

Morphological characterization and mechanical behavior by dicing and thinning on direct bonded Si wafer

Pore structure analysis of ionic liquid-templated porous silica using positron annihilation lifetime spectroscopy

Probing the effect of point defects on the leakage blocking capability of Al0.1Ga0.9N/Si structures using a monoenergetic positron beam

Resolving nanoscale composition fluctuations and defects in advanced interconnects: a crucial step to comprehend thin film resistivity.

Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams

The influence of AlN nucleation layer on Radio Frequency (RF) transmission loss of GaN-on-Si structure

The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure

Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography