Browsing by author "van der Heide, Paul"
Now showing items 21-40 of 54
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Correlative Analysis in The Semiconductor Industry
Larson, D.J.; Prosa, T.J.; Martin, I.; Merkulov, A.; Robbes, A.S.; Dulac, O.; Bernier, N.; Delaye, V.; Franquet, Alexis; van der Heide, Paul; Spampinato, Valentina; Vandervorst, Wilfried (2019) -
Correlative Analysis in The Semiconductor Industry
Larson, D; Prosa, T; Martin, I; Merkulov, A; Robbes, A; Dulac, O; Bernier, N; Delaye, V; Franquet, Alexis; van der Heide, Paul; Spampinato, Valentina; Vandervorst, Wilfried (2019) -
Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM
Conard, Thierry; Spampinato, Valentina; Franquet, Alexis; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Dissociative photoionization of EUV lithography photoresist models
Gentile, Marzio; Gerlach, Marius; Richter, Robert; van Setten, Michiel; Petersen, John; van der Heide, Paul; Holzmeier, Fabian (2023) -
Effects of grain boundaries on the electronic properties of MoS2 layers
Ludwig, Jonathan; Chiappe, Daniele; Mascaro, Marco; Celano, Umberto; Asselberghs, Inge; Radu, Iuliana; van der Heide, Paul; Vandervorst, Wilfried; Paredis, Kristof (2018) -
Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology
Nuytten, Thomas; Bogdanowicz, Janusz; Gawlik, Andrzej; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Charley, Anne-Laure; Fleischmann, Claudia; De Wolf, Ingrid; van der Heide, Paul (2021) -
Ferroelectricity in Si-doped hafnia: probing challenges in absence of screening charges
Celano, Umberto; Gomez, Andres; Piedimonte, Paola; Neumayer, Sabine; Collins, Liam; Popovici, Mihaela Ioana; Florent, Karine; McMitchell, Sean; Favia, Paola; Drijbooms, Chris; Bender, Hugo; Paredis, Kristof; Di Piazza, Luca; Jesse, Stephen; Van Houdt, Jan; van der Heide, Paul (2020) -
Harnessing charge injection in Kelvin probe force microscopy for the evaluation of oxides
Celano, Umberto; Lee, Y.; Serron, Jill; Smith, Cole; Franco, Jacopo; Ryu, K.; Kim, M.; Park, S.; Lee, J.; Kim, J.; van der Heide, Paul (2021) -
High-Energy Photoemission in the lab: A new area of development for interface science
Conard, Thierry; Coultas, Sarah; Erikksonn, Susanna; Mann, Jennifer; van der Heide, Paul (2019) -
Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul (2019) -
Improved atom probe reconstruction through tp shape constraints supplied by scanning probe microscopy
Op de Beeck, Jonathan; Fleischmann, Claudia; Paredis, Kristof; van der Heide, Paul; Vandervorst, Wilfried; Geiser, Brian; Bunton, Joe; Ulfig, Robert; Larson, Dave (2020) -
Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks
Wood, Obert; Wong, Keith; Parks, Valentin; Kearney, Patrick; Meyer-Ilse, Julia; Luong, Vu; Philipsen, Vicky; Faheem, Mohammad; Liang, Yifan; Kumar, Ajay; Chen, Esther; Bennett, Corbin; Bianzhu, Fu; Gribelyuk, Michael; Zhao, Wayne; Mangat, Pawitter; van der Heide, Paul (2016) -
Inelastic Background Analysis of Novel Laboratory-Based HAXPES Spectra
Zborowski, Charlotte; Conard, Thierry; Vanleenhove, Anja; van der Heide, Paul; Vandervorst, Wilfried; Flavell, Wendy; Spencer, Ben (2019) -
Influence of the tip field, laser, pole and zone lines on the quantification of GaN/AlGaN heterostructures
Morris, Richard; Cuduvally, Ramya; Melkonyan, Davit; Zhao, Ming; van der Heide, Paul; Vandervorst, Wilfried (2018) -
Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography
Holzmeier, Fabian; Dorney, Kevin; Witting Larsen, Esben; Nuytten, Thomas; Singh, Dhirendra; van Setten, Michiel; Vanelderen, Pieter; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Bottcher, Stefan; Dyachenko, Oleksiy; Kremzow, Raimund; Wietstruk, Marko; Pourtois, Geoffrey; van der Heide, Paul; Petersen, John (2021-02-22) -
Lloyd's Mirror Interference Lithography Below a 22-nm Pitch with an Accessible, Table-top, 13.5 nm High-Harmonic EUV Source
Dorney, Kevin; Castellanos, Sonia; Witting Larsen, Esben; Holzmeier, Fabian; Singh, Dhirendra Pratap; Vandenbroeck, Nadia; De Simone, Danilo; De Schepper, Peter; Vaglio Pret, Alessandro; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Nuytten, Thomas; van der Heide, Paul; Petersen, John (2021) -
Mechanisms of high-pressure tip-induced material removal toward a tomographic AFM
Celano, Umberto; Pandey, Komal; Wouters, Lennaert; Paredis, Kristof; van der Heide, Paul; Vandervorst, Wilfried (2018) -
Non-filamentary (VMCO) memory: a two- and three-dimensional study on switching and failure modes
Celano, Umberto; Gastaldi, Carlotta; Subhechha, Subhali; Govoreanu, Bogdan; Donadio, Gabriele Luca; Franquet, Alexis; Ahmad, Tareq; Detavernier, Christophe; Richard, Olivier; Bender, Hugo; Goux, Ludovic; Kar, Gouri Sankar; van der Heide, Paul; Vandervorst, Wilfried (2017) -
Opportunities and challenges in APT metrology for semiconductor applications
Fleischmann, Claudia; Cuduvally, Ramya; Morris, Richard; Melkonyan, Davit; Op de Beeck, Jonathan; Makhotkin, Igor; van der Heide, Paul; Vandervorst, Wilfried (2019) -
OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures
Franquet, Alexis; Spampinato, Valentina; Kayser, S.; Vandervorst, Wilfried; van der Heide, Paul (2022)