Browsing by author "Hansen, Ole"
Now showing items 1-20 of 25
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3 omega correction method for eliminating resistance measurement error due to Joule heating
Guralnik, Benny; Hansen, Ole; Henrichsen, Henrik H.; Beltran-Pitarch, Braulio; osterberg, Frederik W.; Shiv, Lior; Marangoni, Thomas A.; Stilling-Andersen, Andreas R.; Cagliani, Alberto; Hansen, Mikkel F.; Nielsen, Peter F.; Oprins, Herman; Vermeersch, Bjorn; Adelmann, Christoph; Dutta, Shibesh; Borup, Kasper A.; Mihiretie, Besira M.; Petersen, Dirch H. (2021) -
Accurate micro Hall effect measurement on scribe line pads
Osterberg, Frederik; Petersen, Dirch; Wang, Fei; Rosseel, Erik; Vandervorst, Wilfried; Hansen, Ole (2009) -
Advanced characterization of carrier profiles in germanium using micro-machined contact probes
Clarysse, Trudo; Konttinen, Mikko; Parmentier, Brigitte; Moussa, Alain; Vandervorst, Wilfried; Impellizzeri, Giuliana; Napolitani, Enrico; Privitera, Vittorio; Nielsen, Peter F.; Petersen, Dirch H.; Hansen, Ole (2012) -
Apparent size effects on dopant activation in nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Favia, Paola; Wouters, Lennaert; Petersen, Dirch Hjorth; Hansen, Ole; Henrichsen, Henrik Hartmann; Nielsen, Peter Former; Shiv, Lior; Vandervorst, Wilfried (2021) -
Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Wen, Liang Gong; Roussel, Philippe; Varela Pedreira, Olalla; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela Ioana; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph (2016-09) -
Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H.; Hansen, Ole; Boggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2009) -
Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H.; Hansen, Ole; Bĝggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2010) -
Fast micro Hall effect measurements on small pads
Ĝsterberg, Frederik Westergaard; Petersen, Dirch; Nielsen, Peter; Rosseel, Erik; Vandervorst, Wilfried; Hansen, Ole (2011) -
Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Oesterberg, Frederik Westergaard; Witthoeft, Maria-Louise; Dutta, Shibesh; Meersschaut, Johan; Adelmann, Christoph; Nielsen, Peter Former; Hansen, Ole; Petersen, Dirch Hjorth (2018) -
High precision micro-scale Hall effect characterization method using in-line micro four-point probes
Petersen, Dirch; Hansen, Ole; Lin, Rong; Nielsen, P.F.; Clarysse, Trudo; Goossens, Jozefien; Rosseel, Erik; Vandervorst, Wilfried (2008) -
In-line resistance measurement of single nanometer-wide trenches and fins
Bogdanowicz, Janusz; Parmentier, Brigitte; Schulze, Andreas; Moussa, Alain; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Porret, Clément; Rosseel, Erik; Hikavyy, Andriy; Hansen, Ole; Petersen, D.H; Henrichsen, H.H.; Nielsen, P.F; Vandervorst, Wilfried (2016) -
In-line sheet resistance measurements of nanometer-wide semiconducting fins
Bogdanowicz, Janusz; Folkersma, Steven; Schulze, Andreas; Moussa, Alain; Merckling, Clement; Kunert, Bernardette; Guo, Weiming; Petersen, Dirch; Witthoft, Maria-Louise; Hansen, Ole; Henrichsen, Henrik; Nielsen, Peter; Vandervorst, Wilfried (2017) -
Micro probe carrier profiling of ultra-shallow structures in germanium
Clarysse, Trudo; Moussa, Alain; Parmentier, Brigitte; Eyben, Pierre; Douhard, Bastien; Vandervorst, Wilfried; Nielsen, Peter; Lin, Rong; Petersen, Dirch; Wang, Fei; Hansen, Ole (2010) -
Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology
Rosseel, Erik; Petersen, Dirch; Osterberg, Frederik; Hansen, Ole; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried; Ortolland, Claude; Hoffmann, Thomas Y.; Chan, Philip; Salnik, Alex; Nicolaides, Lena (2009) -
On the analysis of the activation mechanisms of sub-melt laser anneals
Clarysse, Trudo; Bogdanowicz, Janusz; Goossens, Jozefien; Moussa, Alain; Rosseel, Erik; Vandervorst, Wilfried; Petersen, Dirch; Lin, Rong; Nielsen, P.F.; Hansen, Ole; Merklin, G.; Bennett, N.S.; Cowern, N.E.B. (2008) -
Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Petersen, Dirch H.; Hansen, Ole; Hansen, Torben M.; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick S.; Cowern, Nick E.B. (2009) -
Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Petersen, Dirch; Hansen, Ole; Hansen, Torben; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick; Cowern, Nick (2010) -
Sheet-resistance measurements in nanometer-wide conductive lines
Bogdanowicz, Janusz; Folkersma, Steven; Sergeant, Stefanie; Schulze, Andreas; Paredis, Kristof; Celano, Umberto; Kunert, Bernardette; Guo, Weiming; Mols, Yves; Petersen, Dirch; Witthoft, Maria-Louise; Hansen, Ole; Henrichsen, Henrik; Nielsen, Pieter; Vandervorst, Wilfried (2017) -
Study of submelt laser induced junction nonuniformities using Therma-Probe
Rosseel, Erik; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried; Ortolland, Claude; Hoffmann, Thomas Y.; Salnik, Alex; Nicolaides, Lena; Han, Sang-Hyun; Petersen, Dirch; Lin, Rong; Hansen, Ole (2010) -
Systematic study of shallow junction formation on Germanium substrates
Hellings, Geert; Rosseel, Erik; Clarysse, Trudo; Petersen, Dirch Hjorth; Hansen, Ole; Nielsen, Peter Folmer; Simoen, Eddy; Eneman, Geert; De Jaeger, Brice; Hoffmann, Thomas Y.; De Meyer, Kristin; Vandervorst, Wilfried (2010)