Browsing by author "Koelling, Sebastian"

3D-Atomprobe : facts, artifacts and applications in semiconductors

Vandervorst, Wilfried; Koelling, Sebastian; Gilbert, Matthieu; Kambham, Ajay Kumar (2010)

3D-carrier profiling in FinFETs using scanning spreading resistance microscopy

Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; De Keersgieter, An; Eneman, Geert; Kambham, Ajay Kumar; Drijbooms, Chris; Schulze, Andreas; Chiarella, Thomas; Horiguchi, Naoto; Hoffmann, Thomas; Eyben, Pierre; Vandervorst, Wilfried (2011)

3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions

Vandervorst, Wilfried; Schulze, Andreas; Eyben, Pierre; Zschaetzsch, Gerd; Koelling, Sebastian; Kumar, Arul; Mody, Jay; Gilbert, Matthieu (2011)

Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies

Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H. (2007)

Atom probe analysis of a 3D-finfet with high-k metal gate

Gilbert, Matthieu; Vandervorst, Wilfried; Koelling, Sebastian; Kambham, Ajay Kumar (2011)

Atom probe for FinFET dopant characterization

Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Koelling, Sebastian; Vandervorst, Wilfried (2010)

Conductive diamond probes with electroplated holder chips

Koelling, Sebastian; Hantschel, Thomas; Vandervorst, Wilfried (2007)

Conformal doping for FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008)

Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008)

Counting dopants/atoms in 2D/3D nanoscale structures

Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Kambham, Ajay Kumar; Koelling, Sebastian; Gilbert, Matthieu (2010)

Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon

Koelling, Sebastian; Richard, Olivier; Bender, Hugo; Uematsu, M.; Schulze, Andreas; Zschaetzsch, Gerd; Gilbert, Matthieu; Vandervorst, Wilfried (2013)

Dopant and carrier profiling for 3D-device architectures

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Eyben, Pierre; Gilbert, Matthieu; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2011)

Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Schatzer, Philipp; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Jurczak, Gosia; Horiguchi, Naoto; Gilbert, Matthieu; Eyben, Pierre; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2010)

Dopant/carrier profiling in nanostructures

Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Mody, Jay; Koelling, Sebastian; Kambham, Ajay Kumar; Gilbert, Matthieu (2010)

Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers

Machkaoutsan, Vladimir; Verheyen, Peter; Bauer, M.; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Loo, Roger; Kim, C.S.; Lauwers, Anne; Horiguchi, Naoto; Kerner, Christoph; Hoffmann, Thomas; Granneman, E.; Vandervorst, Wilfried; Absil, Philippe; Thomas, S.G. (2010)

Failure mechanisms for semiconductor atom probe tips

Koelling, Sebastian; Vandervorst, Wilfried (2008)

field evaporation behavior of high-k metal gate stack under femtosecond laser pulsing

Gilbert, Matthieu; Koelling, Sebastian; Kambham, Ajay Kumar; Vandervorst, Wilfried (2010)

Field evaporation of semiconductors under femtosecond laser illumination

Koelling, Sebastian; Gilbert, Matthieu; Vandervorst, Wilfried (2009)

FIM observation of dopants in silicon

Gilbert, Matthieu; Koelling, Sebastian; Vandervorst, Wilfried (2009)

First electrical demonstration of DRAM compatible Ni silicides

Machkaoutsan, Vladimir; Bauer, Matthias; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Kim, Chul Sung; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Granneman, Ernst; Vandervorst, Wilfried; Thomas, Shawn. G (2009)