Browsing by author "Terzieva, Valentina"
Now showing items 1-20 of 31
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A wet etching technique to reveal threading dislocations in thin germanium layers
Souriau, Laurent; Terzieva, Valentina; Meuris, Marc; Caymax, Matty (2008) -
Analog performance and its variability in sub-10 nm fin-width FinFETs: a detailed analysis
Bhoir, Mandar S.; Chiarella, Thomas; Ragnarsson, Lars-Ake; Mitard, Jerome; Terzieva, Valentina; Horiguchi, Naoto; Mohapatra, Nihar R. (2019) -
Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor
Eneman, Geert; Delabie, Annelies; Van Elshocht, Sven; De Jaeger, Brice; Nicholas, Gareth; Martens, Koen; Brunco, David; Zimmerman, Paul; Houssa, Michel; Pourtois, Geoffrey; Kaczer, Ben; Leys, Frederik; Winderickx, Gillis; Huyghebaert, Cedric; Terzieva, Valentina; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge Layers on Si substrates
Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Clemente, Francesca; Satta, Alessandra; Meuris, Marc (2008) -
Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge layers on Si substrates
Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Meuris, Marc (2007) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution
Souriau, Laurent; Atanasova, Tanya; Terzieva, Valentina; Moussa, Alain; Caymax, Matty; Loo, Roger; Meuris, Marc; Vandervorst, Wilfried (2008) -
Composite nanoparticles for defectivity reduction during CMP
Armini, Silvia; Terzieva, Valentina; Vanhaelemeersch, Serge; Maex, Karen (2004) -
Composite nanoparticles for defectivity reduction during CMP
Armini, Silvia; Terzieva, Valentina; Maex, Karen (2004) -
Copper grain growth in reduced dimensions
Brongersma, Sywert; Vanstreels, Kris; Wu, W.; Zhang, Wenqi; Ernur, Didem; D'Haen, Jan; Terzieva, Valentina; Van Hove, Marleen; Clarysse, Trudo; Carbonell, Laure; Vandervorst, Wilfried; De Ceuninck, Ward; Maex, Karen (2004-06) -
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Corrosion of narrow copper damascene interconnects
Ernur, Didem; Terzieva, Valentina; Wu, Wen; Brongersma, Sywert; Maex, Karen (2004) -
Corrosion of the copper damascene interconnects as a function of the electrochemical plating process parameters
Ernur, Didem; Wu, Wen; Brongersma, Sywert; Terzieva, Valentina; Maex, Karen (2004) -
Effect of sub-10nm fin-widths on the analog performance of FinFETs
Bhoir, Mandar; Nihar, Mohapatra; Chiarella, Thomas; Ragnarsson, Lars-Ake; Mitard, Jerome; Terzieva, Valentina; Horiguchi, Naoto (2019) -
Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries
Ernur, Didem; Schuhmacher, Jörg; Terzieva, Valentina; Shamiryan, Denis; Maex, Karen (2003) -
Ge and III/V: the CMOS of the future
Heyns, Marc; Adelmann, Christoph; Bellenger, Florence; Brammertz, Guy; Brunco, David; Caymax, Matty; De Jaeger, Brice; Delabie, Annelies; Eneman, Geert; Houssa, Michel; Kaczer, Ben; Lin, Dennis; Martens, Koen; Meuris, Marc; Mitard, Jerome; Opsomer, Karl; Pourtois, Geoffrey; Satta, Alessandra; Scarrozza, Marco; Simoen, Eddy; Sioncke, Sonja; Souriau, Laurent; Terzieva, Valentina; Van Elshocht, Sven (2007) -
Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference
De Jaeger, Brice; Kaczer, Ben; Zimmerman, Paul; Opsomer, Karl; Winderickx, Gillis; Van Steenbergen, Jan; Van Moorhem, Els; Terzieva, Valentina; Bonzom, Renaud; Leys, Frederik; Arena, Chantal; Bauer, Matthias; Werkhoven, Chris; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007-01) -
Germanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Bonzom, Renaud; Caymax, Matty; Houssa, Michel; Kaczer, Ben; Leys, Frederik; Martens, Koen; Opsomer, Karl; Pourghaderi, Mohammad Ali; Satta, Alessandra; Simoen, Eddy; Terzieva, Valentina; Van Moorhem, Els; Winderickx, Gillis; Loo, Roger; Clarysse, Trudo; Conard, Thierry; Delabie, Annelies; Hellin, David; Janssens, Tom; Onsia, Bart; Sioncke, Sonja; Mertens, Paul; Snow, Jim; Van Elshocht, Sven; Vandervorst, Wilfried; Zimmerman, Paul; Brunco, David; Raskin, G.; Letertre, F.; Akatsu, T.; Billon, T.; Heyns, Marc (2007) -
Germanium MOSFET devices: advances in materials understanding, process development, and electrical performance
Brunco, David; De Jaeger, Brice; Eneman, Geert; Mitard, Jerome; Hellings, Geert; Satta, Alessandra; Terzieva, Valentina; Souriau, Laurent; Leys, Frederik; Pourtois, Geoffrey; Houssa, Michel; Winderickx, Gillis; Vrancken, Evi; Sioncke, Sonja; Opsomer, Karl; Nicholas, Gareth; Caymax, Matty; Stesmans, Andre; Van Steenbergen, Jan; Mertens, Paul; Meuris, Marc; Heyns, Marc (2008) -
Germanium: the past and possibly a future material for microelectronics
Brunco, David; De Jaeger, Brice; Eneman, Geert; Satta, Alessandra; Terzieva, Valentina; Souriau, Laurent; Leys, Frederik; Pourtois, Geoffrey; Houssa, Michel; Opsomer, Karl; Nicholas, Gareth; Meuris, Marc; Heyns, Marc (2007)