Browsing by author "Gronheid, Roel"
Now showing items 1-20 of 269
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157-nm photoresist process optimization for a full-field scanner
Light, Scott; Stepanenko, Nickolay; Gronheid, Roel; Van Roey, Frieda; Van Den Heuvel, Dieter; Goethals, Mieke (2004-03) -
157nm resist process performance and integration challenges on a full field scanner
Goethals, Mieke; Gronheid, Roel; List, Scott; Ercken, Monique; Van Roey, Frieda; Van Den Heuvel, Dieter; Locorotondo, Sabrina; Ronse, Kurt (2004) -
28nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy directed self-assembly (DSA) process flow
Chan, BT; Tahara, Shigeru; Parnell, Doni; Rincon Delgadillo, Paulina; Gronheid, Roel; de Marneffe, Jean-Francois; Xu, Kaidong; Nishimura, Eiichi; Werner, Thilo (2013) -
2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro; Gronheid, Roel; Kunnen, Eddy; Pargon, Erwine; Luere, Olivier; Bianchi, Davide (2012) -
2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro; Kunnen, Eddy; Gronheid, Roel; Pargon, Erwine; Luere, Olivier; Bianchi, Davide (2013) -
A comparison of positive- and negative tone contact hole process flows using the IMEC NXE 3100
Younkin, Todd; Winroth, Gustaf; Gronheid, Roel (2012) -
A novel method for characterizing resist performance
Van Steenwinckel, David; Gronheid, Roel; Van Roey, Frieda; Willems, Patrick; Lammers, Jeroen H. (2008) -
A novel method for characterizing resist performance
Van Steenwinckel, David; Gronheid, Roel; Lammers, J.H.; Myers, Alan; Van Roey, Frieda; Willems, Patrick (2007) -
Addressing the challenges of Directed Self Assembly implementation
Gronheid, Roel; Pollentier, Ivan; Younkin, Todd; Somervell, Mark; Nafus, Kathleen; Hooge, Josh; Rathsack, Ben; Scheer, Steven; Rincon Delgadillo, Paulina; Nealy, Paul (2011) -
Advanced lithography materials as key scaling enablers
Vandenberghe, Geert; De Simone, Danilo; Gronheid, Roel (2014) -
Advanced optical lithography: double patterning options for 32 and 22nm node
Vandeweyer, Tom; Maenhoudt, Mireille; Vangoidsenhoven, Diziana; Gronheid, Roel; Versluijs, Janko; Miller, Andy; Bekaert, Joost; Truffert, Vincent; Wiaux, Vincent (2009) -
Advances and challenges in dual-tone development process optimization
Fonseca, Carlos; Somervell, Mark; Scheer, Steven; Printz, Wallace; Nafus, Kathleen; Hatakeyama, Shinichi; Kuwahara, Yuhei; Niwa, Takafumi; Bernard, Sophie; Gronheid, Roel (2009) -
Advances in dual-tone development for pitch frequency doubling
Fonseca, Carlos; Somervell, Mark; Scheer, Steven; Kuwahara, Yuhei; Nafus, Kathleen; Gronheid, Roel; Tarutani, Shinji; Enomoto, Yuuchiro (2010) -
Advances in process optimization for dual-tone development as a double patterning technique
Fonseca, Carlos; Somervell, Mark; Bernard, Sophie; Hatakeyama, Shinichi; Nafus, Kathleen; Leeson, Michael; Scheer, Steven; Gronheid, Roel (2008) -
All track directed self-assembly of block copolymers: process flow and origin of defects
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher J.; Wu, Hengpeng; Cao, Yi; Somervell, Mark; Nafus, Kathleen; Nealy, Paul F. (2012) -
Alternative process schemes for double patterning that eliminate the intermediate etch step
Maenhoudt, Mireille; Gronheid, Roel; Stepanenko, Nickolay; Matsuda, Takashi; Vangoidsenhoven, Diziana (2008) -
Analysis of the effect of point-of-use filtration on microbridging defectivity
Braggin, Jennifer; Gronheid, Roel; Cheng, Shaunee; Van Den Heuvel, Dieter; Bernard, Sophie; Foubert, Philippe; Rosslee, Craig (2009) -
Assessment of challenges in EUV resist outgassing and contamination characterization
Pollentier, Ivan; Lokasani, Ragava; Gronheid, Roel (2012) -
Assessment of resist outgassing related EUV optics contamination for CAR and non-CAR material chemistries
Pollentier, Ivan; Neira, Imanol; Gronheid, Roel (2011) -
Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology
Fenger, Germain; Burbine, Andrew; Torres, J. Andres; Ma, Yuansheng; Granik, Yuri; Krasnova, Polina; Vandenberghe, Geert; Gronheid, Roel; Bekaert, Joost (2014)