Browsing by author "Zyryanov, S."
Now showing items 1-9 of 9
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Effect of VUV and EUV radiation on utra low-k materials damage
Braginsky, O.; Kovalev, A.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Zyryanov, S.; Baklanov, Mikhaïl (2013) -
Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature
Lopaev, D; Rakhimova, T; Mankelevich, Y; Kurchikov, K.; Zyryanov, S.; Zotovich, A.; Baklanov, Mikhaïl (2015) -
F atoms interaction with nanoporous OSG low-k materials
Rakhimova, T.; Rakhimov, A.; Zyryanov, S.; Lopaev, D.; Mankelevich, Y.; Proshina, O.; Novikova, N.; Kurchikov, K.; Baklanov, Mikhaïl (2014) -
Interaction of atomic fluorine with porous low-k SiCOH films: modeling
Palov, A.; Voronina, E.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Zyryanov, S.; Proshina, O.; Baklanov, Mikhaïl (2015) -
Interaction of F atoms with SiCOH ultra low-k films. Part I: Fluorination and damage
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Rakhimov, A.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Kurchikov, K.; Zyryanov, S.; Palov, A.P.; Proshina, O.V.; Maslakov, K.; Baklanov, Mikhaïl (2015) -
Low-k OSG damage and etching by F atoms at lowered temperatures
Zyryanov, S.; Kurchikov, D.; Lopaev, D.; Mankelevich, Y.; Palov, A.; Rakhimova, T.; Voronina, E.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Modification of OSG based low-k films under EUV and VUV exposure
Rakhimova, T.; Rakhimov, A.; Mankelevich, Y.; Lopaev, D.; Kovalev, A.; Vasil'eva, A.; Proshina, O.; Braginsky, O.; Zyryanov, S.; Kurchikov, K.; Novikova, N.; Baklanov, Mikhaïl (2013) -
Ultra low-k dielectrics damage under VUV and EUV radiation
Zyryanov, S.; Braginsky, O.; Kovaev, A.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Rakhimov, A.; Vasilieva, A.; Baklanov, Mikhaïl (2012)