Browsing by author "Akanishi, Yuya"

BEOL pre-metallization wet clean: post-etch residue removal and metal compatibility

Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Iwasaki, Akihisa; Holsteyns, Frank (2018)

Cleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication.

Pacco, Antoine; Le, Quoc Toan; Akanishi, Yuya; Altamirano Sanchez, Efrain (2020)

Cobalt pre-metallization clean and functional water rinse in BEOL interconnect

Kesters, Els; Le, Quoc Toan; van der Veen, Marleen; Akanishi, Yuya; Hideaki, Iino; Mizutani, Atsushi; Holsteyns, Frank (2019)

Controlled cobalt recess for advanced interconnect metallization

Pacco, Antoine; Akanishi, Yuya; Le, Quoc Toan; Kesters, Els; Murdoch, Gayle; Holsteyns, Frank (2019)

Controlled cobalt recess for advanced interconnect metallization

Pacco, Antoine; Akanishi, Yuya; Murdoch, Gayle; Le, Quoc Toan; Holsteyns, Frank (2019)

Corrosion of Co in BEOL interconnects in dilute HF solution

Akanishi, Yuya; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank (2018)

Effect of cleaning chemistries on cobalt: surface chemistries

Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; van der Veen, Marleen; Mizutani, Atsushi; Holsteyns, Frank (2018)

Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing

Iino, Hideaki; Tanaka, Yoichi; Gan, Nobuko; Fukui, Takeo; Akanishi, Yuya; Iwahata, Shota; Oniki, Yusuke; Altamirano Sanchez, Efrain; Holsteyns, Frank (2021)

Study of cobalt etch control by pH and oxidizer

Ogawa, Yuichi; Gan, Nobuko; Masaoka, Toru; Yoshimura, Minami; Iino, Hideaki; Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Holsteyns, Frank (2018)

Study of cobalt wet recess for fully self aligned vias in advanced interconnects

Akanishi, Yuya; Pacco, Antoine; Holsteyns, Frank (2019)

Study of copper surface preparation by sequential atomic layer wet etching and laser annealing treatments

Iwasaki, Akihisa; Akanishi, Yuya; Mazzamuto, Fulvio; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank (2017)

Study of copper surface preparation by sequential atomic layer wet etching and laser annealing treatments

Iwasaki, Akihisa; Akanishi, Yuya; Matsumoto, Fulvio; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank (2017)

Study on La2O3 wet clean by pH controlled functional water

Ogawa, Yuichi; Hideaki, Iino; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019)

Study on La2O3 wet clean by pH controlled functional water

Ogawa, Yuichi; Iino, Hideaki; Fukui, Takeo; Oniki, Yusuke; Akanishi, Yuya; Altamirano Sanchez, Efrain; Holsteyns, Frank (2019)