Browsing by author "Wang, Bo"
Now showing items 1-11 of 11
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A new method to determine the internal pressure and leakage rate of MEMS packages
Wang, Bo; De Coster, Jeroen; Witvrouw, Ann; Severi, Simone; Wevers, Martine; De Wolf, Ingrid (2013) -
A novel method to measure the internal pressure of MEMS thin-film packages
Wang, Bo; De Coster, Jeroen; De Wolf, Ingrid; Wevers, Martine (2013) -
Comparison of three methods to measure the internal pressure of empty MEMS packages
Wang, Bo; Tanaka, Shuji; De Coster, Jeroen; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012) -
Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Cherman, Vladimir; Varela Pedreira, Olalla; Wang, Bo; El Ghannudi, Hamza; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2013-01) -
Fast analytical design of MEMS capacitive pressure sensors with sealed cavities
Rochus, Veronique; Wang, Bo; Tilmans, Harrie; Ray Chaudhuri, Ashesh; Helin, Philippe; Severi, Simone; Rottenberg, Xavier (2016) -
Fast analytical design of poly-SiGe MEMS pressure sensors
Rochus, Veronique; Wang, Bo; Ray Chaudhuri, Ashesh; Helin, Philippe; Severi, Simone; Rottenberg, Xavier (2015) -
Gas leak rate study of MEMS thin film package in different environments
Wang, Bo; De Coster, Jeroen; Wevers, Martine; De Wolf, Ingrid (2014) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2011) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012) -
Poly-SiGe-based MEMS thin-film encapsulation
Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann (2012)