Browsing by author "Thomas, S.G."
Now showing items 1-13 of 13
-
Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions
Bargallo Gonzalez, Mireia; Thomas, Nicole; Simoen, Eddy; Verheyen, Peter; Hikavyy, Andriy; Leys, Frederik; Okuno, Yasutoshi; Vissouvanadin Soubaretty, Bertrand; Van Daele, Benny; Geenen, Luc; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2007) -
Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Machkaoutsan, Vladimir; Verheyen, Peter; Bauer, M.; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Loo, Roger; Kim, C.S.; Lauwers, Anne; Horiguchi, Naoto; Kerner, Christoph; Hoffmann, Thomas; Granneman, E.; Vandervorst, Wilfried; Absil, Philippe; Thomas, S.G. (2010) -
Electrical performance comparison of embedded Si1-xGex source/drain junctions processed in 200 mm and 300 mmEpi-reactors
Bargallo Gonzalez, Mireia; Simoen, Eddy; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Caymax, Matty; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Wise, R.; Claeys, Cor (2008) -
Impact of the Ge content and the epitaxial thickness on the bandgap shrinkage induced leakage current of recessed Si1-xGex source/drain junctions
Bargallo Gonzalez, Mireia; Simoen, Eddy; Vissouvanadin Soubaretty, Bertrand; Thomas, Nicole; Taleb, Nadjib; Verheyen, Peter; Hikavyy, Andriy; Leys, Frederik; Richard, Olivier; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P; Wise, R. (2007) -
Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions
Bargallo Gonzalez, Mireia; Simoen, Eddy; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Caymax, Matty; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, S.G.; Wise, Rick; Claeys, Cor (2009) -
Influence of the highly-doped drain implantation and the window size on defect creation in p/n Si1-xGex source/drain junctions
Chowdhury, Mohammad Kamruzzaman; Vissouvanadin Soubaretty, Bertrand; Bargallo Gonzalez, Mireia; Bhouri, Nada; Verheyen, Peter; Hikavyy, Andriy; Richard, Olivier; Geypen, Jef; Bender, Hugo; Loo, Roger; Claeys, Cor; Simoen, Eddy; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2008) -
On the 1/f noise in pMOSFETs with embedded SiGe source/drain
Simoen, Eddy; Verheyen, Peter; Shickova, Adelina; Hikavyy, Andriy; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G. (2007) -
On the low-frequency noise performance of embedded Si:C nMOSFETs
Simoen, Eddy; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Bauer, M.; Thomas, S.G. (2009) -
On the low-frequency noise performance of embedded Si:C nMOSFETs
Simoen, Eddy; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Bauer, M.; Thomas, S.G. (2009) -
Relaxation induced excess leakage current in recessed Si1-xGex source/drain junctions
Bargallo Gonzalez, Mireia; Chowdhury, Mohammad Kamruzzaman; Bhouri, Nada; Verheyen, Peter; Leys, Frederik; Richard, Olivier; Loo, Roger; Claeys, Cor; Simoen, Eddy; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2007) -
SiCP selective epitaxial growth in recessed source/drain regions yielding to drive current enhancement in n-channel MOSFET
Bauer, M.; Machkaoutsan, V.; Weeks, D.; Zhang, Y.; Thomas, S.G.; Verheyen, Peter; Kerner, Christoph; Clemente, Francesca; Bender, Hugo; Shamiryan, Denis; Loo, Roger; Hoffmann, Thomas; Absil, Philippe; Biesemans, Serge (2008) -
SiGe recessed source-drain (RSD) stressors for PMOS: effect of device integration flow and increased Ge content on electrical performance
Machkaoutsan, Vladimir; Verheyen, Peter; Tomasini, P.; Eneman, Geert; Loo, Roger; Absil, Philippe; Thomas, S.G.; Lu, Jiong Ping; Weijtmans, J.W.; Wise, R. (2007) -
Stress analysis of Si1-xGex embedded source/drain junctions
Bargallo Gonzalez, Mireia; Simoen, Eddy; Naka, N.; Okuno, Y; Eneman, Geert; Hikavyy, Andriy; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, S.G.; Lu, J.P; Wise, Rick (2008)