Browsing by author "Polspoel, Wouter"
Now showing items 1-20 of 25
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0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Menou, Nicolas; Wang, Xin Peng; Kaczer, Ben; Polspoel, Wouter; Popovici, Mihaela Ioana; Opsomer, Karl; Pawlak, Malgorzata; Knaepen, W.; Detavernier, C.; Blomberg, T.; Pierreux, D.; Swerts, Johan; Maes, Jan; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2008) -
Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopy
Mody, Jay; Eyben, Pierre; Polspoel, Wouter; Schulze, Andreas; Nazir, Aftab; Vandervorst, Wilfried (2008) -
Bipolar switching characteristics and scalability in NiO layers made by thermal oxidation of Ni
Goux, Ludovic; Polspoel, Wouter; Lisoni, Judit; Chen, Yangyin; Pantisano, Luigi; Wang, Xin Peng; Vandervorst, Wilfried; Jurczak, Gosia; Wouters, Dirk (2010) -
Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM
Polspoel, Wouter; Vandervorst, Wilfried; Petry, Jasmine; Conard, Thierry; Benedetti, Alessandro (2005) -
Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier (2008) -
Comparison of standard macroscopic and conductive atomic force microscopy leakage measurements on gate removed high-k capacitors
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, L.; Porti, M.; Nafria, M.; Aymerich, X. (2009) -
Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
Menou, Nicolas; Popovici, Mihaela Ioana; Clima, Sergiu; Opsomer, Karl; Polspoel, Wouter; Kaczer, Ben; Rampelberg, Geert; Tomida, Kazuyuki; Pawlak, Malgorzata; Detavernier, Christophe; Pierreux, Dieter; Swerts, Johan; Maes, Jan Willem; Manger, Dirk; Badylevich, M; Afanasiev, Valeri; Conard, Thierry; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Pourtois, Geoffrey; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2009) -
Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFM
Polspoel, Wouter; Vandervorst, Wilfried (2007) -
Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, R. G. R.; Vandervorst, Wilfried (2010) -
Experimental studies of dose retention and activation in FinFet-based structures
Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, Robbert; Vandervorst, Wilfried (2009) -
High resolution study of high-k dielectrics with Conductive AFM
Polspoel, Wouter; Vandervorst, Wilfried (2008) -
High resolution study of high-k layers using C-AFM
Polspoel, Wouter (2012-02) -
High-k dielectrics for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, Wouter; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, Pamela; Maes, Jan; Manger, Dirk; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes
Pawlak, Malgorzata; Kaczer, Ben; Kim, Min-Soo; Popovici, Mihaela Ioana; Tomida, Kazuyuki; Swerts, Johan; Opsomer, Karl; Polspoel, Wouter; Favia, Paola; Vrancken, Christa; Demeurisse, Caroline; Wang, W.-C.; Afanasiev, Valeri; Vandervorst, Wilfried; Bender, Hugo; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Improved characterization of high-k degradation with vacuum C-AFM
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier (2008) -
Improved nano-scale characterization of high-k dielectrics with vacuum C-AFM
Polspoel, Wouter; Aguilera, Lidia; Vandervorst, Wilfried; Volodin, Alexander; Van Haesendonck, Chris; Conard, Thierry (2007) -
Influence of vacuum environment in conductive AFM measurements on advanced MOS gate dielectrics
Aguilera, Lidia; Polspoel, Wouter; Vandervorst, Wilfried; Nafria, Montserrat; Aymerich, Xavier (2007) -
Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics
Aguilera, Lidia; Polspoel, Wouter; Volodin, Alexander; Van Haesendonck, Chris; Porti, Marc; Vandervorst, Wilfried; Nafria, Montserrat; Aymerich, Xavier (2008) -
Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, Lidia; Porti, Marc; Nafria, Montserrat; Aymerich, Xavier (2008) -
Nanoscale analysis of planar and 3D-Si-structures
Vandervorst, Wilfried; Eyben, Pierre; Polspoel, Wouter; Mody, Jay; Gilbert, Matthieu; Koelling, Sebastian (2009)