Browsing by author "Sinapi, Fabrice"
Now showing items 1-13 of 13
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A high-reliable Cu/ULK integration scheme using Metal Hard Mask and Low-k capping film
Travaly, Youssef; Tsutsue, M.; Ikeda, Atsushi; Verdonck, Patrick; Tokei, Zsolt; Willegems, Myriam; Van Aelst, Joke; Struyf, Herbert; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Claes, Martine; Heylen, Nancy; Sinapi, Fabrice; Richard, Olivier; De Roest, David; Kaneko, S; Kemeling, N; Fukazawa, A; Matsuki, N; Matsushita, K; Tsuji, N; Kagami, K; Sprey, Hessel; Beyer, Gerald (2007) -
CMP of a RU based layer in an advanced Cu low-k stack
Vaes, Jan; Sinapi, Fabrice; Hernandez, Jose Luis; Santoro, Gaetano; Nguyen, Olivier; Wang, James (2007-10) -
Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping film
Tsutsue, Makoto; Travaly, Youssef; Ikeda, Atsushi; Tokei, Zsolt; Willegems, Myriam; Struyf, Herbert; Sinapi, Fabrice; Richard, Olivier; Kemeling, Nathan; De Roest, David; Fukuzawa, A.; Matsuki, N.; Sprey, Hessel; Beyer, Gerald (2007) -
Impact of ceria properties and CMP parameters on STI CMP performance
De Messemaeker, Jo; Put, Stijn; Nelis, Daniel; Van den bosch, Jeroen; Strauven, Yvan; Lippens, Paul; Sinapi, Fabrice; Ong, Patrick; Devriendt, Katia (2007) -
Impact of ceria properties and CMP parameters on STI CMP performance
De Messemaeker, Jo; Sinapi, Fabrice; Ong, Patrick; Put, Stijn; Nelis, Daniel; Van den bosch, Jeroen; Strauven, Yvan; Lippens, Paul; Devriendt, Katia (2007) -
Impact of direct CMP on surface and bulk properties of high porosity low-k materials
Heylen, Nancy; Sinapi, Fabrice; Travaly, Youssef; Vereecke, Guy; Baklanov, Mikhaïl; Carbonell, Laure; Van Hoeymissen, Jan; Hellin, David; Hernandez, Jose Luis (2007) -
Influence of pH on the channel cracking rate of organosilicate films in wet ambients
Iacopi, Francesca; Elia, Carmine; Fournier, Teddy; Sinapi, Fabrice; Heylen, Nancy; Travaly, Youssef (2007) -
Influence of ultra low-k material properties on post direct CMP damage
Sinapi, Fabrice; Travaly, Youssef; Heylen, Nancy; Vereecke, Guy; Baklanov, Mikhaïl; Hernandez, Jose Luis; Beyer, Gerald; Lytle, S; Fischer, P; Cockburn, A; Santoro, G; Nguyen, O (2007) -
Materials characterization of WNxCy, WNx and WCx films for advanced barriers
Volders, Henny; Tokei, Zsolt; Bender, Hugo; Brijs, Bert; Caluwaerts, Rudy; Carbonell, Laure; Conard, Thierry; Drijbooms, Chris; Franquet, Alexis; Garaud, Sylvain; Hoflijk, Ilse; Li, Wei-Min; Moussa, Alain; Sinapi, Fabrice; Sprey, Hessel; Travaly, Youssef; Vanhaeren, Danielle; Vereecke, Guy (2007) -
Stress-corrosion of organosilicate glass films in aqueous environments: role of pH
Iacopi, Francesca; Elia, Carmine; Fournier, Teddy; Sinapi, Fabrice; Travaly, Youssef (2008) -
Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP
Sinapi, Fabrice; Heylen, Nancy; Travaly, Youssef; Vereecke, Guy; Baklanov, Mikhaïl; Kesters, Els; Van Hoeymissen, Jan; Hernandez, Jose Luis; Beyer, Gerald; Fisher, P. (2007) -
The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
Travaly, Youssef; Sinapi, Fabrice; Heylen, Nancy; Humbert, Aurelie; Delande, Tinne; Caluwaerts, Rudy; Gueneau de Mussy, Jean Paul; Vereecke, Guy; Baklanov, Mikhaïl; Iacopi, Francesca; Hernandez, Jose Luis; Beyer, Gerald; Fischer, Pamela (2007) -
Thin film characterization of PEALD Ru layers on an ALD WNC substrate
Volders, Henny; Tokei, Zsolt; Sinapi, Fabrice; Bender, Hugo; Benedetti, Alessandro; Brijs, Bert; Conard, Thierry; Franquet, Alexis; Steenbergen, Johnny; Travaly, Youssef; Sprey, Hessel; Li, Wei-Min; Shimizu, Akira; Park, Hyung Sang (2007)