Browsing by author "Whelan, Caroline"
Now showing items 1-20 of 57
-
A novel approach to characterise a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Le, Quoc Toan; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A novel approach to characterization of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Brijs, Bert; Conard, Thierry; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H. (2002) -
A thermal stability study of Alkane and aromatic thiolate self-assembled monolayers on copper surfaces
Carbonell, Laure; Whelan, Caroline; Kinsella, Michael; Maex, Karen (2004) -
Atomic layer deposited barriers for copper interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Ernur, Didem; Tokei, Zsolt; Travaly, Youssef; Bruynseraede, Christophe; Satta, Alessandra; Whelan, Caroline; Shamiryan, Denis; Beyer, Gerald; Abell, Thomas; Sutcliffe, Victor; Schaekers, Marc; Maex, Karen (2004) -
Carbon nanotube catalysis by metal silicide: resolving inhibition versus growth
Esconjauregui, Santiago Cruz; Whelan, Caroline; Maex, Karen (2007) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, Timo; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi,; Brijs, Bert; Jonas, A.M.; Vantomme, Andre; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Chemical versus electrostatic forces: characterization of different types of polymer-silica composite naoparticles
Armini, Silvia; Whelan, Caroline; Maex, Karen (2004) -
Composite polymer core – ceria shell abrasive particles during silicon oxide CMP
Armini, Silvia; De Messemaeker, Joke; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2007) -
Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Composite polymer core–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMP
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2007) -
Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study
Armini, Silvia; Whelan, Caroline; Maex, Karen; Hernandez, Jose Luis; Moinpour, Mansour (2007) -
Copper CMP with composite polymer core - silica shell abrasives: A defectivity study
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2009) -
Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Corrosion inhibition by self-assembled monolayers for enhanced wire bonding on Cu surfaces
Whelan, Caroline; Kinsella, Michael; Carbonell, Laure; Ho, Meng; Maex, Karen (2003) -
Corrosion inhibition by thiol-derived SAMs for enhanced wire bonding on Cu surfaces
Whelan, Caroline; Kinsella, Michael; Hong, Meng Ho; Maex, Karen (2004) -
Cu adsorption on carboxylic acid-terminated self-assembled monolayers: a high-resolution X-ray photoelectron spectroscopy study
Whelan, Caroline; Ghijsen, Jacques; Pireaux, Jean-Jacques; Maex, Karen (2004)