Browsing by author "Luysberg, Martina"
Now showing items 1-11 of 11
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Effects on the HE implantation energy on the strain relaxation of epitaxial Si0.8Ge0.2/Si(100) heterostructures
Morschbacher, Mario; da Silva, Douglas; Fichtner, Paulo; Zawislak, Fernando; Hollaender, Bernd; Luysberg, Martina; Mantl, Siegfried; Caymax, Matty; Loo, Roger (2004) -
In-situ TEM on He implantation induced defects in SiGe/Si
Luysberg, Martina; Hueging, N.; Urban, K.; Buca, D.; Holländer, B.; Mantl, S.; Morschbacher, M.; Fichtner, P.F.P.; Loo, Roger; Caymax, Matty (2004) -
Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
Thomas, Reji; Ehrhart, Peter; Roeckerath, Martin; Van Elshocht, Sven; Rije, Eduard; Luysberg, Martina; Boese, Markus; Schubert, Jürgen; Caymax, Matty; Waser, Rainer (2007) -
Non-selective and selective thin SiGe strain-relaxed buffer layers: growth and carbon-induced relaxation
Caymax, Matty; Delhougne, Romain; Ries, Michael; Luysberg, Martina; Loo, Roger (2005) -
Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates
Huging, Norbert; Luysberg, Martina; Urban, Knut; Buca, Dan; Hollander, Bernd; Mantl, Siegfried; Morschbacher, Marcio; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2005) -
Strain relaxation of SiGe/Si heterostructures by helium ionimplantation and subsequent annealing : Helium precipitates acting as dislocation sources
Hueging, Norbert; Luysberg, Martina; Urban, Knut; Buca, Dan; Hollaender, Bernd; Mantl, Siegfried; Morschbacher, Marcio; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2005) -
Strained silicon on relaxed SiGe made by strain transfer
Mantl, Siegfried; Buca, Dan M.; Holländer, Bernd; Trinkaus, Helmut; Luysberg, Martina; Houben, L.; Carius, Reinhard; Loo, Roger; Caymax, Matty; Schäfer, Herbert (2004) -
The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures
Luysberg, Martina; Hueging, Norbert; Lenk, Steffi; Buca, Dan; Hollaender, Bernd; Mantl, Siegfried; Marcio, J; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2004) -
The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices
Mantl, S.; Buca, Dan; Hollander, Bernd; Trinkaus, Helmut; Hueging, Norbert; Luysberg, Martina; Lenk, Steffi; Loo, Roger; Caymax, Matty; Shaefer, Herbert; Reiche, Manfred; Radu, Ionut (2005) -
Thin SiGe strain-relaxed buffer layers: carbon-induced relaxation
Caymax, Matty; Delhougne, Romain; Loo, Roger; Ries, Michael; Luysberg, Martina (2005) -
Thin SiGe strain-relaxed buffer layers: relaxation mechanism and integration in strained Si MOS-FETs
Caymax, Matty; Delhougne, Romain; Loo, Roger; Eneman, Geert; Verheyen, Peter; Ries, Michael; Luysberg, Martina (2005)