Browsing by author "Younkin, Todd"

A comparison of positive- and negative tone contact hole process flows using the IMEC NXE 3100

Younkin, Todd; Winroth, Gustaf; Gronheid, Roel (2012)

Addressing the challenges of Directed Self Assembly implementation

Gronheid, Roel; Pollentier, Ivan; Younkin, Todd; Somervell, Mark; Nafus, Kathleen; Hooge, Josh; Rathsack, Ben; Scheer, Steven; Rincon Delgadillo, Paulina; Nealy, Paul (2011)

Chain scission resists for extreme ultraviolet lithography based on high performance polysulfone-containing polymers

Lawrie, Kirsten J.; Blakey, Idriss; Blinco, James P.; Cheng, Han Hao; Gronheid, Roel; Jack, Kevin S.; Pollentier, Ivan; Leeson, Michael J.; Younkin, Todd; Whittaker, Andrew K. (2011)

Comparison of directed self-assembly integrations

Somervell, Mark; Gronheid, Roel; Hooge, Joshua; Nafus, Kathleen; Rincon Delgadillo, Paulina; Thode, Chris; Younkin, Todd; Matsunaga, Koichi; Rathsack, Ben; Scheer, Steven; Nealy, Paul (2012)

Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012)

Critical material properties for pattern collapse mitigation

Winroth, Gustaf; Younkin, Todd; Blackwell, James M.; Gronheid, Roel (2012)

EUV secondary electron blur at the 22nm half pitch node

Gronheid, Roel; Younkin, Todd; Leeson, Michael; Fonseca, Carlos; Hooge, Joshua; Nafus, Kathleen; Biafore, John; Smith, Mark D. (2011)

Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control

Romo Negreira, Ainhoa; Younkin, Todd; Gronheid, Roel; Demuynck, Steven; Vandenbroeck, Nadia; Seo, Takehito; Guerrero, Douglas; Parnell, Doni; Muramatsu, Makoto; Shinichiro, Kawakami; Takashi, Yamauchi; Nafus, Kathleen; Somervell, Mark (2014)

Evidence of speckle in extreme-UV lithography

Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Pei-Yang, Yan; Leeson, Michael; Younkin, Todd (2012-10)

Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists

Lawrie, Kirsten; Blakey, Idriss; Blinco, James; Gronheid, Roel; Jack, Kevin; Pollentier, Ivan; Leeson, Michael; Younkin, Todd; Whittaker, Andrew K. (2011)

Extreme-ultraviolet secondary electron blur at the 22-nm half pitch node

Gronheid, Roel; Younkin, Todd; Leeson, Michael J.; Fonseca, Carlos; Hooge, Joshua S.; Nafus, Kathleen; Biafore, John J.; Smith, Mark D. (2011)

Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern

Gronheid, Roel; Rincon Delgadillo, Paulina; Younkin, Todd; Pollentier, Ivan; Somervell, Mark; Hooge, Joshua S.; Nafus, Kathleen; Nealey, Paul F. (2012)