Browsing by author "Waldfried, Carlo"
Now showing items 1-9 of 9
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Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
Iacopi, Francesca; Waldfried, Carlo; Abell, Thomas; Guyer, Eric; Eyckens, Brenda; Travaly, Youssef; Sajavaara, Timo; Gage, David M.; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005) -
Improved low-k dielectric properties using He/H2 plasma for resist removal
Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, K.; Kaneko, S.; Tsuji, N.; Luo, S.; Escorcia, O.; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2008) -
Improved low-k dielectric properties using He/H2 plasma for resist removal
Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Jonas, Alain; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, Kiyohiro; Kaneko, Shinya; Tsuji, Naoto; Luo, Shijian; Escorcia, Orlando; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2009) -
Non-oxidizing solvent-based strip of ion implanted photoresist
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, J; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2012) -
Non-oxidizing solvent-based strip of ion implanted photoresist
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, J; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2010) -
Post extension ion implant photo resist strip for 32 nm technology and beyond
Mannaert, Geert; Witters, Liesbeth; Shamiryan, Denis; Boullart, Werner; Han, Keping; Luo, Shiian; Falepin, Annelies; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo (2008) -
Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, James; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2011) -
Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure
Iacopi, Francesca; Beyer, Gerald; Travaly, Youssef; Waldfried, Carlo; Gage, David M.; Dauskardt, Reinhold; Houthoofd, Kristof; Jacobs, Pierre; Adriaensens, Peter; Schulze, Knut; Schulz, Stefan; List, Scott; Carlotti, Giovanni (2007-02) -
UV-assisted curing: an effective technique for toughening of low-k organosilicate films
Iacopi, Francesca; Waldfried, Carlo; Houthoofd, Kristof; Guyer, Eric; Gage, David; Carlotti, Giovanni; Travaly, Youssef; Abell, Thomas; Escorcia, Orlando; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005)