Browsing by author "Marsik, Premysl"

Application of UV irradiation in removal of post-etch 193 nm photoresist

Le, Quoc Toan; Kesters, Els; Prager, Lutz; Lux, Marcel; Marsik, Premysl; Vereecke, Guy (2009)

Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry

Marsik, Premysl; Urbanowicz, Adam; Vinokur, Klara; Cohen, Yoel; Baklanov, Mikhaïl (2008)

Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths

Prager, Lutz; Naumov, Sergei; Pistol, L.; Wennrich, L.; Buchmeister, M. R.; Marsik, Premysl; Verdonck, Patrick; Baklanov, Mikhaïl (2008)

Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Prager, L.; Marsik, Premysl; Wennrich, L.; Baklanov, Mikhaïl; Naumov, S.; Pistol, L.; Schneider, D.; Gerlach, J.W.; Verdonck, Patrick; Buchmeiser, M.R. (2008)

Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance

Marsik, Premysl; Urbanowicz, Adam; Verdonck, Patrick; De Roest, David; Sprey, Hessel; Baklanov, Mikhaïl (2011)

Engineering of chemical and physical properties of low-k materials by different wavelength of UV light

Baklanov, Mikhaïl; Marsik, Premysl; Verdonck, Patrick; Ferchichi, Abdelkarim; Urbanowicz, Adam; Prager, L.; De Roest, D.; Mechri, C. (2008)

Improved low-k dielectric properties using He/H2 plasma for resist removal

Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, K.; Kaneko, S.; Tsuji, N.; Luo, S.; Escorcia, O.; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2008)

Improved low-k dielectric properties using He/H2 plasma for resist removal

Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Jonas, Alain; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, Kiyohiro; Kaneko, Shinya; Tsuji, Naoto; Luo, Shijian; Escorcia, Orlando; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2009)