Browsing by author "Carter, Richard"
Now showing items 21-33 of 33
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On the electrical characterization of high-kappa dielectrics
Degraeve, Robin; Cartier, Eduard; Kauerauf, Thomas; Carter, Richard; Pantisano, Luigi; Kerber, Andreas; Groeseneken, Guido (2002) -
Passivation and interface state density of SiO2/HfO2-based/polycrystalline-Si gate stacks
Carter, Richard; Cartier, Eduard; Kerber, Andreas; Pantisano, Luigi; Schram, Tom; De Gendt, Stefan; Heyns, Marc (2003) -
Plasma modification of Hf based high-k dielectrics: effect of nitridation and silicon nitride deposition
Tsai, W.; Maes, J.W.; De Witte, Hilde; Chen, J.; Delabie, Annelies; Carter, Richard; Richard, Olivier; Caymax, Matty; Conard, Thierry; Young, Edward; De Gendt, Stefan (2004) -
Scalability of MOCVD-deposited Hafnium oxide
Van Elshocht, Sven; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; Date, Lucien; De Gendt, Stefan; Kaushik, Vidya; Kerber, Andreas; Kluth, J.; Lujan, Guilherme; Petry, Jasmine; Pique, Didier; Richard, Olivier; Rohr, Erika; Shimamoto, Yasuhiro; Tsai, Wilman; Heyns, Marc (2003) -
Scaling of high-k dielectrics towards sub-1nm EOT
Heyns, Marc; Beckx, Stephan; Bender, Hugo; Blomme, Pieter; Boullart, Werner; Brijs, Bert; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Henson, Kirklen; Kauerauf, Thomas; Kubicek, Stefan; Lucci, Luca; Lujan, Guilherme; Mentens, Jimmy; Pantisano, Luigi; Petry, Jasmine; Richard, Olivier; Röhr, Erika; Schram, Tom; Vandervorst, Wilfried; Van Doorne, Patrick; Van Elshocht, Sven; Westlinder, Jörgen; Witters, Thomas; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Green, Martin; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, Steven; Tsai, Wilman; Young, Edward; Manabe, Yukiko; Shimamoto, Yasuhiro; Bajolet, Philippe; De Witte, Hilde; Maes, Jan; Date, Lucien; Pique, Didier; Coenegrachts, Bart; Vertommen, Johan; Passefort, Sophie (2003) -
Stabilization of amorphous structures in ALCVD high-k oxide layers
Zhao, Chao; Richard, Olivier; Bender, Hugo; Young, Edward; Carter, Richard; Tsai, Wilman; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Roebben, G.; Van der Biest, O.; Maes, Jos; Tuominen, Marko; Haukka, S. (2001) -
Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model
Houssa, Michel; Stesmans, Andre; Carter, Richard; Heyns, Marc (2001) -
Surface preparation and interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition
Tsai, Wilman; Carter, Richard; Nohira, Hiroshi; Caymax, Matty; Conard, Thierry; Cosnier, Vincent; De Gendt, Stefan; Heyns, Marc; Petry, Jasmine; Richard, Olivier; Vandervorst, Wilfried; Young, Edward; Zhao, Chao; Maes, Jan; Tuominen, M.; Schulte, W.H.; Garfunkel, E.; Gustafsson, T. (2003) -
TaN metal gate MOSFETs with agressively scaled HfO2 dielectrics
Lander, Rob; Schram, Tom; Lujan, Guilherme; Hooker, Jacob; Vertommen, Johan; Lee, S.; Deweerd, Wim; Boullart, Werner; Van Elshocht, Sven; Carter, Richard; Kubicek, Stefan; De Meyer, Kristin; De Gendt, Stefan; Heyns, Marc (2003) -
The influence of defects on campatibility and yield of the HfO2-polysilicon gate stack for CMOS integration
Kaushik, Vidya; De Gendt, Stefan; Carter, Richard; Claes, Martine; Röhr, Erika; Pantisano, Luigi; Kluth, Jon; Kerber, Andreas; Cosnier, Vincent; Cartier, Eduard; Tsai, Wilman; Young, Edward; Green, Martin; Chen, Jerry; Jang, S.A.; Lin, S.; Delabie, Annelies; Van Elshocht, Sven; Manabe, Yukiko; Richard, Olivier; Zhao, Chao; Bender, Hugo; Caymax, Matty; Heyns, Marc (2003) -
The origins of fluorine in dry ultrathin silicon oxides
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc (2001) -
Thermal stability and scalability of zr-aluminate-based high-k gate stacks
Chen, Jerry; Cartier, Eduard; Carter, Richard; Kauerauf, Thomas; Zhao, Chao; Pétry, Jasmine; Cosnier, Vincent; Xu, Zhen; Kerber, Andreas; Tsai, Wilman; Young, Edward; Kubicek, Stefan; Caymax, Matty; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Copel, M.; Besling, Wim; Bajolet, Philippe; Maes, Jan (2002) -
Thermostability of amorphous zirconium aluminate high-K layers
Zhao, Chao; Richard, Olivier; Young, Edward; Bender, Hugo; Roebben, G.; Haukka, S.; De Gendt, Stefan; Houssa, Michel; Carter, Richard; Tsai, Wilman; Van Ber Biest, O.; Heyns, Marc (2002)