Browsing by author "Vadakupudhu Palayam, Senthil"
Now showing items 1-14 of 14
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A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication
Kruv, Anastasiia; Gonzalez, Mario; Okudur, Oguzhan Orkut; Spampinato, Valentina; Franquet, Alexis; Vadakupudhu Palayam, Senthil; Arreghini, Antonio; Van den Bosch, Geert; Rosmeulen, Maarten; De Wolf, Ingrid (2022) -
Direct yield prediction from SEM images
Choona, Lilach; Linshiz, Jasmine; Pres, Shaul; Levant, Boris; Tal, Noam; Santoro, Gaetano; Baudot, Sylvain; Opdebeeck, Ann; Reifsnider, Jason; Vadakupudhu Palayam, Senthil; Lorusso, Gian; Mitard, Jerome; Yogev, Shay (2023) -
Exploration of Scandium Doping in Sb2Te3 for Phase Change Memory Application
Barci, Marinela; Leonelli, Daniele; Zhou, Xue; Wang, Xiaojie; Garbin, Daniele; Jayakumar, Ganesh; Witters, Thomas; Franchina Vergel, Nathali; Kundu, Shreya; Vadakupudhu Palayam, Senthil; Jiao, Huifang; Wu, Hao; Kar, Gouri Sankar (2022-11) -
First demonstration of monocrystalline silicon macaroni channel for 3-D NAND memory devices
Delhougne, Romain; Arreghini, Antonio; Rosseel, Erik; Hikavyy, Andriy; Vecchio, Emma; Zhang, Liping; Pak, Murat; Nyns, Laura; Raymaekers, Tom; Jossart, Nico; Breuil, Laurent; Vadakupudhu Palayam, Senthil; Tan, ChiLim; Van den Bosch, Geert; Furnemont, Arnaud (2018) -
First demonstration of MOVPE In1-xGaxAs macaroni channel for 3-D NAND memory devices
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Rosseel, Erik; Arreghini, Antonio; Kunert, Bernardette; Baryshnikova, Marina; Zhang, Liping; Ong, Patrick; Teugels, Lieve; Pak, Murat; Jossart, Nico; Raymaekers, Tom; Stiers, Jimmy; Van den Bosch, Geert; Furnemont, Arnaud (2019) -
IMEC – A leading R&D partner for advancing the global semiconductor ecosystem and CMOS technology platforms
Vadakupudhu Palayam, Senthil (2021-11-15) -
Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs
Tyaginov, Stanislav; O'Sullivan, Barry; Vaisman Chasin, Adrian; Rawal, Yaksh; Chiarella, Thomas; Toledo de Carvalho Cavalcante, Camila; Kimura, Yosuke; Vandemaele, Michiel; Ritzenthaler, Romain; Mitard, Jerome; Vadakupudhu Palayam, Senthil; Reifsnider, Jason; Kaczer, Ben (2023) -
Impact of SiON tunnel layer composition on 3D NAND cell performance
Breuil, Laurent; Nyns, Laura; Banerjee, Kaustuv; Vadakupudhu Palayam, Senthil; Subirats, Alexandre; Richard, Olivier; Conard, Thierry; Van den Bosch, Geert; Furnemont, Arnaud (2019) -
Improvement of conduction in 3D NAND memory devices by channel and junction optimization
Arreghini, Antonio; Banerjee, Kaustuv; Verreck, Devin; Vadakupudhu Palayam, Senthil; Rosseel, Erik; Nyns, Laura; Van den Bosch, Geert; Furnemont, Arnaud (2019) -
In depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devices
Tan, Chi Lim; Lavizzari, Simone; Blomme, Pieter; Breuil, Laurent; Vecchio, Emma; Sebaai, Farid; Paraschiv, Vasile; Tao, Zheng; Schepers, Bart; Nyns, Laura; Peter, Antony; Dekkers, Harold; Ong, Patrick; Tsvetanova, Diana; Devriendt, Katia; Teugels, Lieve; Heylen, Nancy; Raymaekers, Tom; Jossart, Nico; Mennella, Pasquale; Delhougne, Romain; Vadakupudhu Palayam, Senthil; Arreghini, Antonio; Van den Bosch, Geert; Furnemont, Arnaud (2017) -
Surround Gate Transistor With Epitaxially Grown Si Pillar and Simulation Study on Soft Error and Rowhammer Tolerance for DRAM
Han, Jin-Woo; Kim, Jungsik; Beery, Dafna; Bozdag, K. Deniz; Cuevas, Peter; Levi, Amitay; Tain, Irwin; Tran, Khai; Walker, Andrew J.; Vadakupudhu Palayam, Senthil; Arreghini, Antonio; Furnemont, Arnaud; Meyappan, M. (2021) -
Trap reduction and performances improvements study after high pressure anneal process on single crystal channel 3D NAND devices
Subirats, Alexandre; Arreghini, Antonio; Delhougne, Romain; Rosseel, Erik; Hikavyy, Andriy; Breuil, Laurent; Vadakupudhu Palayam, Senthil; Van den Bosch, Geert; Linten, Dimitri; Furnemont, Arnaud (2018) -
Understanding and variability of lateral charge migration in 3D CT-NAND flash with and without band-gap engineered barriers
Padovani, Andrea; Pesic, Milan; Anik Kumar, Mondol; Blomme, Pieter; Subirats, Alexandre; Vadakupudhu Palayam, Senthil; Baten, Zunaid; Larcher, Luca; Van den Bosch, Geert (2019) -
Understanding the kinetics of Metal Induced Lateral Crystallization process to enhance the poly-Si channel quality and current conduction in 3-D NAND memory
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Ajaykumar, Arjun; Opsomer, Karl; Bastos, Joao; Ragnarsson, Lars-Ake; Breuil, Laurent; Arreghini, Antonio; Wouters, Lennaert; Spampinato, Valentina; Favia, Paola; Nalin Mehta, Ankit; Carolan, Patrick; Nyns, Laura; Katcko, Kostantine; Stiers, Jimmy; Van den Bosch, Geert; Rosmeulen, Maarten (2021)