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Direct yield prediction from SEM images
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Authors
Choona, Lilach
;
Linshiz, Jasmine
;
Pres, Shaul
;
Levant, Boris
;
Tal, Noam
;
Santoro, Gaetano
;
Baudot, Sylvain
;
Opdebeeck, Ann
;
Reifsnider, Jason
;
Vadakupudhu Palayam, Senthil
;
Lorusso, Gian
;
Mitard, Jerome
;
Yogev, Shay
DOI
10.1117/12.2658294
EISBN
978-1-5106-6100-4
ISBN
978-1-5106-6099-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVII
Journal
Proceedings of SPIE
Volume
12496
Title
Direct yield prediction from SEM images
Publication type
Proceedings paper
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Conference contributions
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Version
Item
Date
Summary
3
20.500.12860/42237.3
*
2024-06-06T07:38:42Z
validation by library/open access desk
1
20.500.12860/42237
2023-07-28T17:39:56Z
*Selected version
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