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Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs
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Authors
Tyaginov, Stanislav
;
O'Sullivan, Barry
;
Vaisman Chasin, Adrian
;
Rawal, Yaksh
;
Chiarella, Thomas
;
Toledo de Carvalho Cavalcante, Camila
;
Kimura, Yosuke
;
Vandemaele, Michiel
;
Ritzenthaler, Romain
;
Mitard, Jerome
;
Vadakupudhu Palayam, Senthil
;
Reifsnider, Jason
;
Kaczer, Ben
DOI
10.3390/mi14081514
ISSN
2072-666X
PMID
MEDLINE:37630050
Issue
8
Journal
MICROMACHINES
Volume
14
Title
Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs
Publication type
Journal article
Embargo date
2023-07-28
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Summary
2
20.500.12860/42546.2
*
2023-12-12T08:11:07Z
validation by library/open access desk
1
20.500.12860/42546
2023-09-15T17:43:59Z
*Selected version
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