Browsing by author "Urbanowicz, Adam"
Now showing items 21-40 of 44
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Improved low-k dielectric properties using He/H2 plasma for resist removal
Urbanowicz, Adam; Shamiryan, Denis; Marsik, Premysl; Travaly, Youssef; Jonas, Alain; Verdonck, Patrick; Vanstreels, Kris; Ferchichi, Abdelkarim; De Roest, David; Sprey, Hessel; Matsushita, Kiyohiro; Kaneko, Shinya; Tsuji, Naoto; Luo, Shijian; Escorcia, Orlando; Berry, Ivan; Waldfried, Carlo; De Gendt, Stefan; Baklanov, Mikhaïl (2009) -
Improving mechanical robustness of ultra-low-k SiOCH PECVD glasses by controlled porogen decomposition prior to UV-hardening
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Improving mechanical robustness of ultra-low-k SiOCH PECVD materials
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Influence of the UV Cure on advanced PECVD low-k materials
Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Vanstreels, Kris; Urbanowicz, Adam; De Roest, David; Baklanov, Mikhaïl (2010) -
Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materials
Verdonck, Patrick; Van Besien, Els; Vanstreels, Kris; Trompoukis, Christos; Urbanowicz, Adam; De Roest, David; Baklanov, Mikhaïl (2011) -
Integrated diffusion - recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials
Kunnen, Eddy; Barkema, Gerard; Maes, Christian; Shamiryan, Denis; Urbanowicz, Adam; Struyf, Herbert; Baklanov, Mikhaïl (2010) -
Integrated diffusion-recombination model for describing the logarithic time dependency of plasma damage in porous low-k materials
Kunnen, Eddy; Barkema, Gerard; Maes, Christian; Shamiryan, Denis; Urbanowicz, Adam; Struyf, Herbert; Baklanov, Mikhaïl (2011) -
Mechanism of k-value reduction of PECVD Low-k films treated with He/H2 ash plasma
Urbanowicz, Adam; Cremel, Maxime; Vanstreels, Kris; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2010) -
Metal hard-mask based double patterning for 22nm and beyond
Struyf, Herbert; de Marneffe, Jean-Francois; Goossens, Danny; Hendrickx, Dirk; Huffman, Craig; Kunnen, Eddy; Lazzarino, Frederic; Milenin, Alexey; Shamiryan, Denis; Urbanowicz, Adam; Vandervorst, Alain; Boullart, Werner (2010) -
Modeling the substrate effects on nanoindentation mechanical property measurement
Gonzalez, Mario; Vanstreels, Kris; Urbanowicz, Adam (2009) -
Nanoindentation study of thin plasma enhanced chemical vapor depoosition SiCOH low-k films modified in He/H2 downstream plasma
Vanstreels, Kris; Urbanowicz, Adam (2010) -
Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectrics
Urbanowicz, Adam; Baklanov, Mikhaïl; Shamiryan, Denis; Soberon, Felipe; Daniels, Stephen; De Gendt, Stefan (2008) -
Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation of Low-k dielectrics
Urbanowicz, Adam; Shamiryan, Denis; Baklanov, Mikhaïl; De Gendt, Stefan (2008) -
Plasma induced low-k modification and its impact on reliability
Tokei, Zsolt; Baklanov, Mikhaïl; Ciofi, Ivan; Li, Yunlong; Urbanowicz, Adam (2007) -
Plasma modification of Si-O-Si bond structure in porous SiOCH films
Dultsev, F.N.; Urbanowicz, Adam; Baklanov, Mikhaïl (2008) -
Plasma-induced damage to low-k materials
Baklanov, Mikhaïl; Urbanowicz, Adam; Travaly, Youssef (2008) -
Porogen residue free ultra low-k PECVD material: fabrication, optical and mechanical properties
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Cremel, Maxime; De Gendt, Stefan; Baklanov, Mikhaïl (2009) -
Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
Safaverdi, Soghra; Barkema, Gerard; Kunnen, Eddy; Urbanowicz, Adam; Maes, Christian (2011) -
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl (2007) -
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl (2008)