Browsing by author "De Witte, Hilde"
Now showing items 21-40 of 49
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Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3nm) studied by XPS and TOFSIMS
Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Houssa, Michel; Heyns, Marc; Pomarede, C.; Werkhoven, Chris (2000) -
Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS
Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Houssa, Michel; Heyns, Marc; Pomarede, C.; Werkhoven, Chris (1999) -
Investigation of fluorine in dry ultrathin silicon oxides
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc (2000) -
Investigation of fluorine in dry ultrathin silicon oxides
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc (2001) -
Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
De Witte, Hilde; Conard, Thierry; Gouttebaron, R.; Magnee, R.; Caudano, R.; Vandervorst, Wilfried; Gijbels, Toon (1998) -
Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, R. (2003) -
Modeling of bombardment induced oxidation of silicon
De Witte, Hilde; Vandervorst, Wilfried; Gijbels, Renaat (2001) -
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
De Witte, Hilde; Vandervorst, Wilfried; Gijbels, Renaat (1998) -
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
De Witte, Hilde; Vandervorst, Wilfried; Gijbels, Renaat (1997) -
Nitrogen analysis in high-k stack layers: a challenge
Conard, Thierry; Vandervorst, Wilfried; De Witte, Hilde; Van Elshocht, Sven (2003) -
Nitrogen analysis in high-k stack layers: a challenge
Conard, Thierry; Vandervorst, Wilfried; De Witte, Hilde; Van Elshocht, Sven (2004) -
Observation of the radiative decay of the Th-229 nuclear clock isomer
Kraemer, Sandro; Moens, Janni; Athanasakis-Kaklamanakis, Michail; Bara, Silvia; Beeks, Kjeld; Chhetri, Premaditya; Chrysalidis, Katerina; Claessens, Arno; Cocolios, Thomas E.; Correia, Joao G. M.; De Witte, Hilde; Ferrer, Rafael; Geldhof, Sarina; Heinke, Reinhard; Hosseini, Niyusha; Huyse, Mark; Koester, Ulli; Kudryavtsev, Yuri; Laatiaoui, Mustapha; Lica, Razvan; Magchiels, Goele; Manea, Vladimir; Merckling, Clement; Pereira, Lino M. C.; Raeder, Sebastian; Schumm, Thorsten; Sels, Simon; Thirolf, Peter G.; Tunhuma, Shandirai Malven; van den Bergh, Paul; Van Duppen, Piet; Vantomme, Andre; Verlinde, Matthias; Villarreal, Renan; Wahl, Ulrich (2023) -
On the reliability of SIMS depth profiles through HfO2-stacks
Vandervorst, Wilfried; Bennett, J.; Huyghebaert, Cedric; Conard, Thierry; Gondran, C.; De Witte, Hilde (2004) -
Plasma modification of Hf based high-k dielectrics: effect of nitridation and silicon nitride deposition
Tsai, W.; Maes, J.W.; De Witte, Hilde; Chen, J.; Delabie, Annelies; Carter, Richard; Richard, Olivier; Caymax, Matty; Conard, Thierry; Young, Edward; De Gendt, Stefan (2004) -
Quantitative TOFSIMS depth profiling of ultra thin silicon oxynitride films
Conard, Thierry; De Witte, Hilde; Schaekers, Marc; Vandervorst, Wilfried (2000) -
Scaling of high-k dielectrics towards sub-1nm EOT
Heyns, Marc; Beckx, Stephan; Bender, Hugo; Blomme, Pieter; Boullart, Werner; Brijs, Bert; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Henson, Kirklen; Kauerauf, Thomas; Kubicek, Stefan; Lucci, Luca; Lujan, Guilherme; Mentens, Jimmy; Pantisano, Luigi; Petry, Jasmine; Richard, Olivier; Röhr, Erika; Schram, Tom; Vandervorst, Wilfried; Van Doorne, Patrick; Van Elshocht, Sven; Westlinder, Jörgen; Witters, Thomas; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Green, Martin; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, Steven; Tsai, Wilman; Young, Edward; Manabe, Yukiko; Shimamoto, Yasuhiro; Bajolet, Philippe; De Witte, Hilde; Maes, Jan; Date, Lucien; Pique, Didier; Coenegrachts, Bart; Vertommen, Johan; Passefort, Sophie (2003) -
SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat (2000) -
Simulation of the initial transient of the Si+ and O+ signals from oxygen sputtered silicon by means of independent models on sputtering and secondary ionization
Serrano, J. J.; De Witte, Hilde; Vandervorst, Wilfried; Guzman, B.; Blanco, J. M. (2001) -
Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 Kev per atom
Serrano, J. J.; Blanco, J. M.; Guzman, B.; De Witte, Hilde; Vandervorst, Wilfried (2001) -
Study of oxynitrides with dual beam TOF-SIMS
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat (2000)