Browsing by author "De Witte, Hilde"

ALCVD hafnium silicates for low power gate stacks

Maes, Jan; Laitinen, O.; De Witte, Hilde; Deweerd, Wim; Delabie, Annelies; Conard, Thierry; Brijs, Bert; Wang, C. - G.; Velasco, H.; Wilk, G. (2004)

Alternative gate insulator materials for future generation MOSFETs

Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Jos; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, R.; Wilhelm, Rudi; Young, Edward; Zhao, Chao (2001)

Analytical characterization of new high k dielectric stacks

De Witte, Hilde; Conard, Thierry; Bender, Hugo; Vandervorst, Wilfried (2000)

Artifacts in SIMS depth profiling

Vandervorst, Wilfried; De Witte, Hilde; Tian, Chunsheng; Geenen, Luc (1997)

Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution

De Witte, Hilde; De Gendt, Stefan; Douglas, M.; Conard, Thierry; Kenis, Karine; Mertens, Paul; Vandervorst, Wilfried; Gijbels, Renaat (1999)

Characterization of (ultra)thin dielectrica

Vandervorst, Wilfried; De Witte, Hilde; Conard, Thierry; Janssens, Tom; Schaekers, Marc; Brijs, Bert; Houssa, Michel (2000)

Characterization of ultra thin oxynitrides, a general approach

Brijs, Bert; Deleu, Jeroen; Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, I.; Neumaier, P.; Dollinger, G.; Dobeli, M. (1999)

Characterization of ultra thin oxynitrides: a general approach

Brijs, Bert; Deleu, Jeroen; Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Genchev, I.; Bermaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000)

Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers

Vandervorst, Wilfried; Conard, Thierry; De Witte, Hilde; Cooke, G. A. (1999)

Engineering ALCVD HfSiO gate stacks for LSTP applications

Swerts, Johan; Deweerd, Wim; De Witte, Hilde; Maes, Jan; Wilk, Glenn; Delabie, Annelies (2005)

Evaluation of Nb(Si)N as metal gate material

Van Hoornick, Nausikaa; De Witte, Hilde; Witters, Thomas; Zhao, Chao; Conard, Thierry; Huatori, H.; Swerts, Johan; Schram, Tom; Maes, Jan; De Gendt, Stefan; Heyns, Marc (2005)

Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces

De Witte, Hilde; De Gendt, Stefan; Douglas, M.; Conard, Thierry; Kenis, Karine; Mertens, Paul; Vandervorst, Wilfried; Gijbels, Renaat (2000)

Fundamental study of ion-substrate interactions with low energy reactive ions

De Witte, Hilde (2001-03)

High k dielectric materials prepared by atomic layer CVD

Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Guido; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, Wilfried; Wilhelm, Rudi; Yang, E.; Zhao, Chao (2001)