Browsing by author "Shi, Xiaoping"
Now showing items 21-40 of 54
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Impact of precursor chemistry on atomic layer deposition of lutetium aluminates
Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Van Elshocht, Sven; Date, Lucien; Schreutelkamp, Rob (2012) -
Implementation of rare earth elements in high-k based gate stacks
Van Elshocht, Sven; Adelmann, Christoph; Nyns, Laura; Delabie, Annelies; Popovici, Mihaela Ioana; Swerts, Johan; Meersschaut, Johan; Shi, Xiaoping; Gielis, Sven; Kesters, Jurgen; Breuil, Laurent; Ragnarsson, Lars-Ake; Schram, Tom; Pourtois, Geoffrey; Pierreux, Dieter; Maes, Jan; Jurczak, Gosia; Kittl, Jorge (2009) -
Implementing cubic-phase HfO2 with $j-value ~ 30 in low-VT replacementgate pMOS devices for improved EOT-Scaling and reliability
Ragnarsson, Lars-Ake; Adelmann, Christoph; Higuchi, Yuichi; Opsomer, Karl; Veloso, Anabela; Chew, Soon Aik; Rohr, Erica; Vecchio, Emma; Shi, Xiaoping; Devriendt, Katia; Sebaai, Farid; Kauerauf, Thomas; Pawlak, Malgorzata; Schram, Tom; Van Elshocht, Sven; Horiguchi, Naoto; Thean, Aaron (2012) -
Interface and border traps in Ge-based gate stacks
Nyns, Laura; Lin, Dennis; Brammertz, Guy; Bellenger, Florence; Shi, Xiaoping; Sioncke, Sonja; Van Elshocht, Sven; Caymax, Matty (2011) -
Investigation of switching behavior of 2-terminal devices on VO2
Radu, Iuliana; Martens, Koen; Govoreanu, Bogdan; Mertens, Sofie; Shi, Xiaoping; Cantoro, Mirco; Jurczak, Gosia; De Gendt, Stefan; Stesmans, Andre; Heyns, Marc; Kittl, Jorge (2011) -
Key contributors for improvement of line width roughness, line edge roughness, and critical dimension uniformity: 15 nm half-pitch patterning with extreme ultraviolet and self-aligned double patterning
Xu, Kaidong; Souriau, Laurent; Hellin, David; Versluijs, Janko; Wong, Patrick; Vangoidsenhoven, Diziana; Vandenbroeck, Nadia; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Tan, Chi Lim; Vertommen, Johan; Coenegrachts, Bart; Orain, Isabelle; Kimura, Yoshie; Wiaux, Vincent; Boullart, Werner (2013-09) -
Lateral and vertical scaling of a QSA HBT for a 0.13μm 200GHz SiGe:C BiCMOS technology
Van Huylenbroeck, Stefaan; Sibaja-Hernandez, Arturo; Piontek, Andreas; Choi, Li Jen; Xu, Mingwei; Ouassif, Nordin; Vleugels, Frank; Van Wichelen, Koen; Witters, Liesbeth; Kunnen, Eddy; Leray, Philippe; Devriendt, Katia; Shi, Xiaoping; Loo, Roger; Decoutere, Stefaan (2004-09) -
Low Vt Ni-FUSI CMOS technology using a DyO cap layer with either single or dual Ni-phases
Yu, HongYu; Chang, Shou-Zen; Veloso, Anabela; Lauwers, Anne; Adelmann, Christoph; Onsia, Bart; Van Elshocht, Sven; Singanamalla, Raghunath; Demand, Marc; Vos, Rita; Kauerauf, Thomas; Brus, Stephan; Shi, Xiaoping; Kubicek, Stefan; Vrancken, Christa; Mitsuhashi, Riichirou; Lehnen, Peer; Kittl, Jorge; Niwa, M.; Yin, K.M.; Hoffmann, Thomas; De Gendt, Stefan; Jurczak, Gosia; Absil, Philippe; Biesemans, Serge (2007) -
Mass metrology for controlling and understanding processes
Vecchio, Emma; Kunnen, Eddy; Redolfi, Augusto; Everaert, Jean-Luc; Delabie, Annelies; Shi, Xiaoping; Vanhaelemeersch, Serge; Cunnane, Liam; Kiermasz, Adrian (2007) -
Monitoring plasma nitridation of HfSiOx by corona charge measurements
Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc; Rosseel, Erik; Pavelka, Tibor; Don, Eric; Vanhaelemeersch, Serge (2007) -
Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass
Sasaki, Yuichiro; Ritzenthaler, Romain; Kimura, Y.; De Roest, David; Shi, Xiaoping; De Keersgieter, An; Kim, Min-Soo; Chew, Soon Aik; Kubicek, Stefan; Schram, Tom; Kikuchi, Yoshiaki; Demuynck, Steven; Veloso, Anabela; Vandervorst, Wilfried; Horiguchi, Naoto; Mocuta, Dan; Mocuta, Anda; Thean, Aaron (2015) -
On the process and material sensitivities for high-k based dielectrics
Van Elshocht, Sven; Adelmann, Christoph; Popovici, Mihaela Ioana; Swerts, Johan; Delabie, Annelies; Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Pourtois, Geoffrey; Menou, Nicolas; Breuil, Laurent; Pierreux, Dieter; Maes, Jan; Hardy, An; Van Bael, Marlies; Jurczak, Gosia; Kittl, Jorge (2010) -
Optimization of HfSiON using a design of experiment (DOE) approach
Rothschild, Aude; Mitsuhashi, Riichirou; Kerner, Christoph; Shi, Xiaoping; Everaert, Jean-Luc; Date, Lucien; Conard, Thierry; Richard, Olivier; Vrancken, Evi; Verbeeck, Rita; Veloso, Anabela; Lauwers, Anne; de Potter de ten Broeck, Muriel; Debusschere, Ingrid; Jurczak, Gosia; Niwa, Masaaki; Absil, Philippe; Biesemans, Serge (2007) -
Optimization of low-temperature silicon nitride processes for improvement of device performance
Sleeckx, Erik; Schaekers, Marc; Shi, Xiaoping; Kunnen, Eddy; Degroote, Bart; Jurczak, Gosia; de Potter de ten Broeck, Muriel; Augendre, Emmanuel (2005) -
Optimization of low-tempurature silicon nitride processes for improvement of device performance
Sleeckx, Erik; Schaekers, Marc; Shi, Xiaoping; Kunnen, Eddy; Degroote, Bart; Jurczak, Gosia; de Potter de ten Broeck, Muriel; Augendre, Emmanuel (2004) -
Partial wetting of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish
Vereecke, Guy; Xu, XiuMei; Tsai, W.K.; Yang, Hui; Armini, Silvia; Delande, Tinne; Doumen, Geert; Kentie, F.; Shi, Xiaoping; Simms, Ihsan; Nafus, Kathleen; Holsteyns, Frank; Struyf, Herbert; De Gendt, Stefan (2014) -
Plasma nitrided silicon rich oxide as an extension to ultra-thin nitrided oxide gate dielectrics
Cubaynes, Florence; Venezia, V.; Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc (2004) -
Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectrics
Cubaynes, F.N.; Venezia, V.C.; van der marel, C.; Snijders, J.H.M.; Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc (2005) -
Process control & integration options of RMG Technology for aggressively scaled devices
Veloso, Anabela; Higuchi, Yuichi; Chew, Soon Aik; Devriendt, Katia; Ragnarsson, Lars-Ake; Sebaai, Farid; Schram, Tom; Brus, Stephan; Vecchio, Emma; Kellens, Kristof; Rohr, Erika; Eneman, Geert; Simoen, Eddy; Cho, Moon Ju; Paraschiv, Vasile; Crabbe, Yvo; Shi, Xiaoping; Tielens, Hilde; Van Ammel, Annemie; Dekkers, Harold; Favia, Paola; Geypen, Jef; Bender, Hugo; Phatak, Anup; del Agua Borniquel, Jose Ignacio; Xu, K.; Allen, M.; Liu, C.; Xu, T.; Yoo, W.S.; Thean, Aaron; Horiguchi, Naoto (2012) -
Rare earth materials for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Popovici, Mihaela Ioana; Swerts, Johan; Delabie, Annelies; Nyns, Laura; Shi, Xiaoping; Tielens, Hilde; Pourtois, Geoffrey; Schram, Tom; Pierreux, Dieter; Maes, Jan; Hardy, An; Van Bael, Marlies; Kittl, Jorge (2010)