Browsing by author "Kunnen, Eddy"
Now showing items 21-40 of 70
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Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Rooyackers, Rita; Augendre, Emmanuel; Degroote, Bart; Collaert, Nadine; Nackaerts, Axel; Dixit, Abhisek; Vandeweyer, Tom; Pawlak, Bartek; Ercken, Monique; Kunnen, Eddy; Dilliway, Gabriela; Leys, Frederik; Loo, Roger; Jurczak, Gosia; Biesemans, Serge (2007) -
Dry etch challenges in a 20 nm half-pitch single damascene spacer-defined patterning scheme
Kunnen, Eddy; Versluijs, Janko; Alaerts, Wilfried; Siew, Yong Kong; Struyf, Herbert; Beyer, Gerald (2010) -
Effect of energetic ions on plasma damage of SiCOH low-k material
Kunnen, Eddy; Urbanowicz, Adam; Franquet, Alexis; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2009) -
Effect of energetic ions on plasma damage of SiCOH low-k material
Kunnen, Eddy; Baklanov, Mikhaïl; Franquet, Alexis; Shamiryan, Denis; Rakhimova, Tatyana; Urbanowicz, Adam; Struyf, Herbert; Boullart, Werner (2010) -
Effect of precoat on the sidewall profile of through silicon via's
Babaei Gavan, Khashayar; Lazzarino, Frederic; Brouri, Mohand; Tutunjyan, Nina; de Marneffe, Jean-Francois; Kunnen, Eddy; Xu, Kaidong (2013) -
Effect of top power on a low-k film during oxygen strip in a TCP chamber
Kunnen, Eddy; Rakhimova, Tatyana; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2010) -
Effect of top power on low-k damage during oxygen strip in a TCP etch chamber
Kunnen, Eddy; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2009) -
Enabling interconnect scaling with spacer-defined double patterning (SDDP)
Siew, Yong Kong; Stucchi, Michele; Versluijs, Janko; Roussel, Philippe; Kunnen, Eddy; Pantouvaki, Marianna; Beyer, Gerald; Tokei, Zsolt (2013) -
Gate-all-around transistors based on vertically stacked Si nanowires
Mertens, Hans; Ritzenthaler, Romain; Hikavyy, Andriy; Kim, Min-Soo; Tao, Zheng; Wostyn, Kurt; Schram, Tom; Kunnen, Eddy; Ragnarsson, Lars-Ake; Dekkers, Harold; Hopf, Toby; Devriendt, Katia; Tsvetanova, Diana; Chew, Soon Aik; Kikuchi, Yoshiaki; Van Besien, Els; Rosseel, Erik; Mannaert, Geert; De Keersgieter, An; Vaisman Chasin, Adrian; Kubicek, Stefan; Dangol, Anish; Demuynck, Steven; Barla, Kathy; Mocuta, Dan; Horiguchi, Naoto (2017) -
Ge deep sub-micron pFETs with etched TaN metal gate on a High-K dielectric, fabricated in a 200mm silicon prototyping line
De Jaeger, Brice; Houssa, Michel; Satta, Alessandra; Kubicek, Stefan; Verheyen, Peter; Van Steenbergen, Jan; Croon, Jeroen; Kaczer, Ben; Van Elshocht, Sven; Delabie, Annelies; Kunnen, Eddy; Sleeckx, Erik; Teerlinck, Ivo; Lindsay, Richard; Schram, Tom; Chiarella, Thomas; Degraeve, Robin; Conard, Thierry; Poortmans, Jef; Winderickx, Gillis; Boullart, Werner; Schaekers, Marc; Mertens, Paul; Caymax, Matty; Vandervorst, Wilfried; Van Moorhem, Els; Biesemans, Serge; De Meyer, Kristin; Ragnarsson, Lars-Ake; Lee, S.; Kota, G.; Raskin, G.; Mijlemans, P.; Autran, J.L.; Afanas'ev, V.; Stesmans, A.; Meuris, Marc; Heyns, Marc (2004) -
Germanium deep-sub micron PMOS transistors with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm prototyping line
Meuris, Marc; De Jaeger, Brice; Kubicek, Stefan; Verheyen, Peter; Van Steenbergen, Jan; Lujan, Guilherme; Kunnen, Eddy; Sleeckx, Erik; Teerlinck, I; Van Elshocht, Sven; Delabie, Annelies; Lindsay, Richard; Satta, Alessandra; Schram, Tom; Chiarella, Thomas; Degraeve, Robin; Richard, Olivier; Conard, Thierry; Poortmans, Jef; Winderickx, Gillis; Houssa, Michel; Boullart, Werner; Schaekers, Marc; Mertens, Paul; Caymax, Matty; De Gendt, Stefan; Vandervorst, Wilfried; Van Moorhem, Els; Biesemans, Serge; De Meyer, Kristin; Ragnarsson, Lars-Ake; Lee, S.; Kota, G.; Raskin, G.; Mijlemans, P.; Afanasiev, Valeri; Stesmans, Andre; Heyns, Marc (2004) -
Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography
Van Dal, Mark; Collaert, Nadine; Doornbos, Gerben; Vellianitis, Georgios; Curatola, Gilberto; Pawlak, Bartek; Duffy, Ray; Jonville, Carole; Degroote, Bart; Altamirano Sanchez, Efrain; Kunnen, Eddy; Demand, Marc; Beckx, Stephan; Vandeweyer, Tom; Delvaux, Christie; Leys, Frederik; Hikavyy, Andriy; Rooyackers, Rita; Kaiser, M.; Weemaes, R.G.R.; Biesemans, Serge; Jurczak, Gosia; Kottantharayil, Anil; Witters, Liesbeth; Lander, Rob (2007) -
Implementation of a Si-rich SiON layer for an improved selective SiGe HBT architecture
Van Huylenbroeck, Stefaan; Loo, Roger; Decoutere, Stefaan; Vleugels, Frank; Kunnen, Eddy; Schaekers, Marc; Caymax, Matty (2002) -
Implementing plasma texturing process with linear microwave plasma sources for ultra-thin multi-crytalline (<150um) solar cells
Chan, BT; Kunnen, Eddy; Uhlig, Matthias; Xu, Kaidong; Boullart, Werner; Rau, Bernd; Poortmans, Jef (2011) -
Independent double-gate FinFets with asymmetric gate stacks
Masahara, Meishoku; Surdeanu, Radu; Witters, Liesbeth; Doornbos, Gerben; Nguyen Hoang, Viet; Van den Bosch, Geert; Vrancken, Christa; Devriendt, Katia; Neuilly, Francois; Kunnen, Eddy; Suzuki, E.; Jurczak, Gosia; Biesemans, Serge (2007) -
Influence and evolution of 193i resist composition during VUV exposure
Kunnen, Eddy; Vaglio Pret, Alessandro; Verdonck, Patrick; Gronheid, Roel (2012) -
Integrated diffusion - recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials
Kunnen, Eddy; Barkema, Gerard; Maes, Christian; Shamiryan, Denis; Urbanowicz, Adam; Struyf, Herbert; Baklanov, Mikhaïl (2010) -
Integrated diffusion-recombination model for describing the logarithic time dependency of plasma damage in porous low-k materials
Kunnen, Eddy; Barkema, Gerard; Maes, Christian; Shamiryan, Denis; Urbanowicz, Adam; Struyf, Herbert; Baklanov, Mikhaïl (2011) -
Integration challenges for multi-gate devices
Collaert, Nadine; Brus, Stephan; De Keersgieter, An; Dixit, Abhisek; Ferain, Isabelle; Goodwin, Michael; Kottantharayil, Anil; Rooyackers, Rita; Verheyen, Peter; Yim, Yong Sik; Zimmerman, Paul; Beckx, Stephan; Degroote, Bart; Demand, Marc; Kim, Myeong-Cheol; Kunnen, Eddy; Locorotondo, Sabrina; Mannaert, Geert; Neuilly, Francois; Shamiryan, Denis; Baerts, Christina; Ercken, Monique; Laidler, David; Leys, Frederik; Loo, Roger; Lisoni, Judit; Snow, Jim; Vos, Rita; Boullart, Werner; Pollentier, Ivan; De Gendt, Stefan; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2005) -
Integration of 20nm half pitch single damascene copper trenches by spacer-defined double patterning (SDDP) on metal hard mask (MHM)
Siew, Yong Kong; Versluijs, Janko; Kunnen, Eddy; Ciofi, Ivan; Alaerts, Wilfried; Dekkers, Harold; Volders, Henny; Suhard, Samuel; Cockburn, Andrew; Sleeckx, Erik; Van Besien, Els; Struyf, Herbert; Maenhoudt, Mireille; Noori, Atif; Padhi, Deenesh; Shah, Kavita; Gravey, Virginie; Beyer, Gerald (2010)