Browsing by author "Loo, Roger"
Now showing items 21-40 of 761
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A new route for fabricating strained Ge-based pMOSFETs
Vincent, Benjamin; Loo, Roger (2012-01) -
A new technique to fabricate Ultra-Shallow-Junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth
Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; Peytier, Ivan; Holsteyns, Frank; Kubicek, Stefan; Verheyen, Peter; Lindsay, Richard; Richard, Olivier (2003-01) -
A new technique to fabricate ultra-shallow-junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth
Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; Peytier, Ivan; Holsteyns, Frank; Kubicek, Stefan; Verheyen, Peter; Lindsay, Richard; Richard, Olivier (2004) -
A novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base process
Donkers, Johan; Kramer, Mark; Van Huylenbroeck, Stefaan; Choi, Li Jen; Meunier-Beillard, Philippe; Boccardi, Guillaume; van Noort, W.; Hurkx, G.A.M.; Vanhoucke, Tony; Sibaja-Hernandez, Arturo; Vleugels, Frank; Winderickx, Gillis; Kunnen, Eddy; Peeters, Stefan; Baute, Debbie; De Vos, Brecht; Vandeweyer, Tom; Loo, Roger; Venegas, Rafael; Pijper, R.; Decoutere, Stefaan; Hijzen, Erwin (2007) -
A record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation
Arimura, Hiroaki; Cott, Daire; Boccardi, Guillaume; Loo, Roger; Wostyn, Kurt; Brus, Stephan; Capogreco, Elena; Opdebeeck, Ann; Witters, Liesbeth; Conard, Thierry; Suhard, Samuel; van Dorp, Dennis; Kenis, Karine; Ragnarsson, Lars-Ake; Mitard, Jerome; Holsteyns, Frank; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine; Horiguchi, Naoto (2019-06) -
A successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility heterojunction pMOS applications
Loo, Roger; Caymax, Matty; Peytier, Ivan; Decoutere, Stefaan; Collaert, Nadine; Verheyen, Peter; Vandervorst, Wilfried; De Meyer, Kristin (2004) -
A vertical Si/Si1-xGex heterojunction pMOSFET with reduced DIBL sensitivity, using a novel gate dielectric approach
Verheyen, P.; Collaert, Nadine; Caymax, Matty; Loo, Roger; De Meyer, Kristin; Van Rossum, Marc (1999) -
(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
Ab initio analysis of defect formation and dopant activation in P and As co-doped Si
Nakazaki, Nobuya; Rosseel, Erik; Porret, Clément; Hikavyy, Andriy; Loo, Roger; Horiguchi, Naoto; Pourtois, Geoffrey (2019) -
Accurate electrical activation characterization of CMOS ultra-shallow profiles
Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I. (2004) -
Advanced germanium devices for optical interconnects
Srinivasan, Ashwyn; Porret, Clément; Shimura, Yosuke; Vissers, Ewoud; Geiregat, Pieter; Loo, Roger; Pantouvaki, Marianna; Van Campenhout, Joris; Van Thourhout, Dries (2018) -
Advanced metrology for beyond silicon semiconductor device structures
Schulze, Andreas; Loo, Roger; Meersschaut, Johan; van Dorp, Dennis; Gachet, David; Berney, Jean; Vandervorst, Wilfried; Caymax, Matty (2015) -
Advanced processes for Si:P and Si:C:P epitaxial growth and low-temperature surface cleaning
Profijt, Harald; Rosseel, Erik; Tolle, John; Weeks, K.D.; Loo, Roger; Mehta, Sandeep; Maes, Jan (2014-11) -
Advances in metrology for complex epitaxial systems embedded in small volums
Vandervorst, Wilfried; Kumar, Arul; Meersschaut, Johan; Franquet, Alexis; Douhard, Bastien; Delmotte, Joris; Conard, Thierry; Nuytten, Thomas; Hantschel, Thomas; Loo, Roger (2015-05) -
Advantage of NW structure in preservation of SRB-induced strain and investigation of off-state leakage in strained stacked Ge NW pFET
Arimura, Hiroaki; Eneman, Geert; Capogreco, Elena; Witters, Liesbeth; De Keersgieter, An; Favia, Paola; Porret, Clément; Hikavyy, Andriy; Loo, Roger; Bender, Hugo; Ragnarsson, Lars-Ake; Mitard, Jerome; Collaert, Nadine; Mocuta, Dan; Horiguchi, Naoto (2018) -
Amorphous inclusions during Ge and GeSn epitaxial growth via chemical vapor deposition
Gencarelli, Federica; Shimura, Yosuke; Kumar, Arul; Vincent, Benjamin; Moussa, Alain; Vanhaeren, Danielle; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Caymax, Matty; Loo, Roger; Heyns, Marc (2015) -
An (un)solvable problem in SIMS: B-interfacial profiling
Vandervorst, Wilfried; Janssens, Tom; Loo, Roger; Caymax, Matty; Peytier, Ivan; Lindsay, Richard; Fruehauf, Jens; Bergmaier, A.; Dollinger, G. (2003) -
An in-depth study of high-performing strained germanium nanaowires pFETs
Mitard, Jerome; Jang, Doyoung; Eneman, Geert; Arimura, Hiroaki; Parvais, Bertrand; Richard, Olivier; Van Marcke, Patricia; Witters, Liesbeth; Capogreco, Elena; Bender, Hugo; Ritzenthaler, Romain; Mertens, Hans; Hikavyy, Andriy; Loo, Roger; Dekkers, Harold; Sebaai, Farid; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine (2018) -
An investigation of disilane-digermane precursors combination for low temperature SiGe epitaxy
Hikavyy, Andriy; Zyulkov, Ivan; Loo, Roger (2015)