Browsing by author "Du Bois, Bert"
Now showing items 21-40 of 53
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HF etching of Si-oxides and Si-nitrides for surface micromachining
Du Bois, Bert; Vereecke, Guy; Witvrouw, Ann; De Moor, Piet; Van Hoof, Chris; De Caussemaeker, Ann; Verbist, Agnes (2001) -
High Single-Molecule Read Throughput for Proteomics with Nanopore Field-Effect Transistors: Approach & Roadmap
Martens, Koen; Barge, David; Liu, Lijun; Santermans, Sybren; Stoquart, Colin; Delport, Jaco; Willems, Kherim; Ruic, Dino; Marion, Sanjin; Gevers, Juliette; Du Bois, Bert; Andrei, Alexandru; Lagae, Liesbet; Veugelers, Mark; Verhulst, Anne; Severi, Simone; Van Dorpe, Pol (2022-10-31) -
Highly reliable and extremely stable SiGe micro-mirrors
Gromova, Maria; Haspeslagh, Luc; Verbist, Agnes; Du Bois, Bert; Van Hoof, Rita; Eyckens, Brenda; Sijmus, Bram; De Wolf, Ingrid; Simons, Veerle; Muller, Philippe; Lauwagie, Tom; Willegems, Myriam; Locorotondo, Sabrina; Boullart, Werner; Baert, Kris; Witvrouw, Ann (2007-01) -
Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications
Haspeslagh, Luc; De Coster, Jeroen; Varela Pedreira, Olalla; De Wolf, Ingrid; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Willegems, Myriam; Locorotondo, Sabrina; Bryce, George; Vaes, Jan; van Drieenhuizen, Bert; Witvrouw, Ann (2008) -
Improvement of PECVD silicon–germanium crystallization for CMOS compatible MEMS applications
Guo, Bin; Severi, Simone; Bryce, George; Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Haspeslagh, Luc; Witvrouw, Ann; Decoutere, Stefaan (2010) -
Integrated photonics for miniature flow cytometry
Verellen, Niels; Vercruysse, Dries; Rochus, Veronique; Du Bois, Bert; Dusa, Alexandra; Kerman, Sarp; Mahmud Ul Hasan, Hasan MD; Van Dorpe, Pol; Rottenberg, Xavier; Lagae, Liesbet (2017) -
Large-scale characterization of silicon nitride-based evanescent couplers at 532nm wavelength
Claes, Tom; Jansen, Roelof; Neutens, Pieter; Du Bois, Bert; Helin, Philippe; Severi, Simone; Van Dorpe, Pol; Deshpande, Paru; Rottenberg, Xavier (2014) -
Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications
Hoffman, Luis; Subramanian, Ananth; Helin, Philippe; Du Bois, Bert; Baets, Roel; Van Dorpe, Pol; Gielen, Georges; Puers, Bob; Braeken, Dries (2016-08) -
Low temperature zero-level hermetic packaging for MEMS based on solder and polymer bonding
De Moor, Piet; Baert, Kris; Du Bois, Bert; Jamieson, Geraldine; Jourdain, Anne; Tilmans, Harrie; Van De Peer, Myriam; Witvrouw, Ann; Van Hoof, Chris (2003) -
Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line
Subramanian, Ananth; Neutens, Pieter; Dhakal, Ashim; Jansen, Roelof; Claes, Tom; Rottenberg, Xavier; Peyskens, Frederic; Selvaraja, Shankar; Helin, Philippe; Du Bois, Bert; Leyssens, Kenny; Severi, Simone; Deshpande, Paru; Baets, Roel; Van Dorpe, Pol (2013) -
Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy
Leonov, Vladimir; Perova, Natalia A.; De Moor, Piet; Du Bois, Bert; Goessens, Claus; Grietens, Bob; Verbist, Agnes; Vermeiren, Jan (2003) -
Optical power distributions through fractal routing
Jansen, Roelof; Claes, Tom; Neutens, Pieter; Du Bois, Bert; Helin, Philippe; Severi, Simone; Van Dorpe, Pol; Deshpande, Paru; Rottenberg, Xavier (2014) -
Poly SiGE microbolometer arrays
De Moor, Piet; Creten, Ybe; Du Bois, Bert; Garcia Cruz, M.; Goessens, Claus; Gromova, Maria; Leonov, Vladimir; Merken, Patrick; Perova, Natalia; Verbist, Agnes; Vermeiren, Jan; Van Hoof, Chris (2002) -
Poly-SiGe-based MEMS thin-film encapsulation
Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann (2012) -
Post processing of a SiNy-based photonic stack above a CMOS imager sensor
Pham, Nga; Tyagi, Hemant Kumar; Du Bois, Bert; Van Hoof, Rita; Winderickx, Gillis; Sabuncuoglu Tezcan, Deniz; Tilmans, Harrie (2018) -
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Van Barel, Greg; Stoffels, Steve; Decoutere, Stefaan; Nguyen, V.; Hentz, S.; Robert, P.; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
Processing of MEMS gyroscopes on top of CMOS ICs
Witvrouw, Ann; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Van Aerde, Steven; Ramos-Martos, J.; Ceballos, J.; Ragel, A.; Mora, J.M.; Lagos, M.A.; Arias, A.; Hinojosa, J.M.; Spengler, J.; Leinenbach, C.; Fuchs, T.; Kronmüller, S. (2005-02) -
Reactive ion etching of Pt and Pt-Metal stacks, for mems applications using the DSE systems at Imec
Jamieson, Geraldine; Severi, Simone; Van Hoof, Rita; Du Bois, Bert; Helin, Philippe; Boullart, Werner (2009) -
Si and SiN biophotonic technology platform, applied to biosensing, spectroscopy, and lens-free imaging
Van Roy, Wim; Neutens, Pieter; Claes, Tom; Jansen, Roelof; Subramanian, Ananth; Jans, Karolien; Vos, Rita; O'Callaghan, John; Vercruysse, Dries; Stahl, Richard; Mukund, Vignesh; Du Bois, Bert; Helin, Philippe; Stassen, Andim; Severi, Simone; Martens, Daan; Bienstman, Peter; Deshpande, Paru; Baets, Roel; Lambrechts, Andy; Lagae, Liesbet; Rottenberg, Xavier; Van Dorpe, Pol (2015) -
SiGe MEMS technology: a platform technology enabling different demonstrators
Witvrouw, Ann; Van Hoof, Rita; Bryce, George; Du Bois, Bert; Verbist, Agnes; Severi, Simone; Haspeslagh, Luc; Osman, Haris; De Coster, Jeroen; Wen, Lianggong; Puers, Bob; Beernaert, Roel; De Smet, Herbert; Rudra, Sukumar; Van Thourhout, Dries (2010)