Publication:
EUV resist chemical gradient enhancement by UV flood exposure for improvement in EUV resist resolution, process control, roughness, sensitivity and stochastic defectivity
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1966 since deposited on 2021-10-29
Acq. date: 2025-12-14
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Views
1966 since deposited on 2021-10-29
Acq. date: 2025-12-14
Citations