Browsing Conference contributions by imec author "13dcefe5013b4ca8662463b7feca3642af9ed6c9"
Now showing items 41-60 of 104
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Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices
Severi, Simone; Kottantharayil, Anil; Pawlak, Bartek; Duffy, Ray; Henson, K.; Lindsay, R.; Lauwers, Anne; Veloso, Anabela; de Marneffe, Jean-Francois; Ramos, Javier; Sijmus, Bram; Devriendt, Katia; Camillo-Castillo, A.; Eyben, Pierre; Vandervorst, Wilfried; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin (2004) -
Direct measurement of semiconductors surface states parameters using Kelvin probe force microscopy
Rosenwaks, Y.; Saraf, S.; Eyben, Pierre; Vandervorst, Wilfried (2003) -
Dopant and carrier profiling for 3D-device architectures
Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Eyben, Pierre; Gilbert, Matthieu; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2011) -
Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution
Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Schatzer, Philipp; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Jurczak, Gosia; Horiguchi, Naoto; Gilbert, Matthieu; Eyben, Pierre; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2010) -
Dopant/carrier profiling for sub-45nm technologies
Vandervorst, Wilfried; Janssens, Tom; Eyben, Pierre; Duriau, Edouard (2005) -
Dopant/carrier profiling in nanostructures
Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Mody, Jay; Koelling, Sebastian; Kambham, Ajay Kumar; Gilbert, Matthieu (2010) -
Dopant/carrier profiling in non-planar or textured structures
Vandervorst, Wilfried; Douhard, Bastien; Eyben, Pierre; Seidel, F.; Hantschel, Thomas (2010) -
Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
Pawlak, Bartek; Duffy, Ray; Janssens, Tom; Vandervorst, Wilfried; Severi, Simone; Richard, Olivier; Benedetti, Alessandro; Eyben, Pierre; Colombeau, B.; Cowern, N.E.B.; Camillo-Castillo, R.A.; Jones, K.S.; Aboy, M. (2005) -
Electrical characterization of carbon nanotube based interconnects
Schulze, Andreas; Hantschel, Thomas; Eyben, Pierre; Dathe, Andre; Nazir, Aftab; Mody, Jay; Celano, Umberto; Ke, Xiaoxing; Vandervorst, Wilfried (2011) -
Epitaxial growth in advanced SiGe and Ge MOS devices: challenges and solutions
Loo, Roger; Vincent, Benjamin; Hikavyy, Andriy; Gencarelli, Federica; Eneman, Geert; Witters, Liesbeth; Mitard, Jerome; Hellings, Geert; Sioncke, Sonja; Bender, Hugo; Eyben, Pierre; Caymax, Matty; Vandervorst, Wilfried; Thean, Aaron (2012-09) -
Experimental studies of dose retention and activation in FinFet-based structures
Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, Robbert; Vandervorst, Wilfried (2009) -
Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Fouchier, Marc; Eyben, Pierre; Alvarez, David; Duhayon, Natasja; Xu, Mingwei; Brongersma, Sywert; Lisoni, Judit; Vandervorst, Wilfried (2003-05) -
Heterostructure at CMOS source/drain: contributor or alleviator to the high access resistance problem?
Yu, Hao; Schaekers, Marc; Rosseel, Erik; Everaert, Jean-Luc; Eyben, Pierre; Chiarella, Thomas; Merckling, Clement; Agarwal Kumar, Tarun; Pourtois, Geoffrey; Hikavyy, Andriy; Kubicek, Stefan; Witters, Liesbeth; Sibaja-Hernandez, Arturo; Mitard, Jerome; Waldron, Niamh; Chew, Soon Aik; Demuynck, Steven; Horiguchi, Naoto; Barla, Kathy; Thean, Aaron; Mocuta, Anda; Mocuta, Dan; Collaert, Nadine; De Meyer, Kristin (2016) -
High resolution electrical characterization of advanced CMOS devices
Eyben, Pierre; Petry, Jasmine; Janssens, Tom; Fukutome, H.; Vandervorst, Wilfried (2004) -
High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Alvarez, David; Fouchier, Marc; Hartwich, J.; Eyben, Pierre; Vandervorst, Wilfried (2003) -
High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Eyben, Pierre; Fukutome, H.; Alvarez, David; Vandervorst, Wilfried (2004) -
Impact of surface preparation on the electrical characteristics of scanning spreading resistance microscopy
Eyben, Pierre; Clarysse, Trudo; Bogdanowicz, Janusz; Janssens, Tom; Mariolle, D.; Bertin, F.; Chabli, A.; Vandervorst, Wilfried (2005) -
Investigation of access resistance components in Si-channel p-FinFET using cascaded devices.
Eyben, Pierre; Arutchelvan, Goutham; Chiarella, Thomas; Arimura, Hiroaki; Ritzenthaler, Romain; Mitard, Jerome; Dentoni Litta, Eugenio; Horiguchi, Naoto; Goux, Ludovic (2022-09) -
Junction architecture for planar devices
Pawlak, Bartek; Duffy, R.; Hoffmann, Thomas Y.; Severi, Simone; Felch, S.B.; Eyben, Pierre; Van Daele, Benny; Vandervorst, Wilfried; Lander, Rob (2007) -
Kinetic Monte Carlo simulations for dopant diffusion and defects in Si and SiGe
Horiguchi, Naoto; Noda, Taiji; Witters, Liesbeth; Mitard, Jerome; Rosseel, Erik; Hellings, Geert; Vrancken, Christa; Eyben, Pierre; Bender, Hugo; Thean, Aaron; Vandervorst, Wilfried (2013)