Publication:
Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
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2009 since deposited on 2021-10-16
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Acq. date: 2026-08-10
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Statistics
Views
2009 since deposited on 2021-10-16
3last month
3last week
Acq. date: 2026-08-10
Citations