Publication:

Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate

Date

2005

Proceedings Paper

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Author(s)

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Vandervorst, Wilfried

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Richard, Olivier

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Benedetti, Alessandro

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Camillo-Castillo, R.A.

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Statistics

2005 since deposited on 2021-10-16

Acq. date: 2026-02-25