Publication:

Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate

Date

2005

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

;

;

Vandervorst, Wilfried

;

;

Richard, Olivier

;

Benedetti, Alessandro

;

;

;

;

Camillo-Castillo, R.A.

;

;

Statistics

2006 since deposited on 2021-10-16

1last month

Acq. date: 2026-05-29