Authors
Pawlak, Bartek;
Duffy, Ray;
Janssens, Tom;
Vandervorst, Wilfried;
Severi, Simone;
Richard, Olivier;
Benedetti, Alessandro;
Eyben, Pierre;
Colombeau, B.;
Cowern, N.E.B.;
Camillo-Castillo, R.A.;
Jones, K.S.;
Aboy, M.
Conference
Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS: New Materials, Processes, and Equipment
Title
Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
Publication type
Proceedings paper
