Browsing by author "Pawlak, Bartek"

A comparison of spike, flash, SPER and laser annealing for 45nm CMOS

Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Torregiani, Cristina; Giangrandi, Simone; Surdeanu, Radu; Vandervorst, Wilfried; Mayur, A.; Ross, J.; McCoy, S.; Gelpey, J.; Elliott, K.; Pagès, Xavier; Satta, Alessandra; Lauwers, Anne; Stolk, P.; Maex, Karen (2003)

A novel concept for advanced modules with back-contact solar cells

Govaerts, Jonathan; Robbelein, Jo; Gong, Chun; Pawlak, Bartek; Gonzalez, Mario; De Wolf, Ingrid; Bossuyt, Frederick; Van Put, Steven; Gordon, Ivan; Vanfleteren, Jan; Beaucarne, Guy; van der Heide, Arvid; Dewallef, Stefan; Baert, Kris (2010-10)

(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers

Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004)

(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers

Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004)

Accurate electrical activation characterization of CMOS ultra-shallow profiles

Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I. (2004)

Advanced FinFET devices for sub-32nm technology nodes: characteristics and integration challenges

Veloso, Anabela; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Van Dal, Mark; Duffy, Ray; Pawlak, Bartek; Lander, Rob; Hoffmann, Thomas Y. (2009)

Advanced front-end processes for the 45nm CMOS technology node

Collart, E.J.H.; Felch, S.B.; Graoui, H.; Tallavarjula, S.; Lindsay, Richard; Pawlak, Bartek; van den Berg, J.A.; Cowern, N.E.B.; Kirby, K.J. (2004)

Advanced PMOS device architecture for highly-doped ultra-shallow junctions

Surdeanu, Radu; Pawlak, Bartek; Lindsay, Richard; Van Dal, Mark; Doornbos, Gerben; Dachs, C.J.J.; Ponomarev, Youri; Loo, Josine; Cubaynes, Florence; Henson, Kirklen; Verheijen, M.A.; Kaiser, M.; Pagès, Xavier; Stolk, Peter; Jurczak, Gosia (2004)

Analysis of diffusion mechanisms for SSD in confined volumes : An alternative solution for extension formation in N7 and N5 technologies

Eyben, Pierre; Pawlak, Bartek; De Keersgieter, An; Kikuchi, Yoshiaki; Mitard, Jerome; Horiguchi, Naoto; Mocuta, Dan; Mocuta, Anda (2018)

Arsenic junction thermal stability and high-dose boron-pocket activation during SPER in nMOS transistors

Severi, Simone; Pawlak, Bartek; Duffy, Ray; Augendre, Emmanuel; Henson, Kirklen; Lindsay, Richard; De Meyer, Kristin (2007)

Athermal germanium migration in strained silicon layers during junction formation with solid-phase epitaxial regrowth

Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Loo, Roger; Caymax, Matty; Pawlak, Bartek; Posselt, Matthias (2005)

Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

Pelaz, L.; Duffy, Ray; Aboy, M.; Marques, L.; Lopez, P.; Santos, I.; Pawlak, Bartek; Van Dal, Mark; Duriez, Blandine; Merelle, Thomas; Doornbos, Gerben; Collaert, Nadine; Witters, Liesbeth; Rooyackers, Rita; Vandervorst, Wilfried; Jurczak, Gosia; Kaiser, M.; Weemaes, R.; Van Berkum, J.; Breimer, P.; Lander, Rob (2008)

B profile alteration by annealing in reactive ambients

Pawlak, Bartek; Cowern, N.E.B.; Vandervorst, Wilfried (2009)

Carrier illumination as a tool to probe implant dose and electrical activation

Vandervorst, Wilfried; Clarysse, Trudo; Brijs, Bert; Loo, Roger; Peytier, Ivan; Pawlak, Bartek; Budiarto, E.; Borden, P. (2003)

Channel engineering and junction overlap issues for ultra-shallow junctions formed by SPER in the 45 nm CMOS technology node

Severi, Simone; Henson, Kirklen; Lindsay, Richard; Lauwers, Anne; Pawlak, Bartek; Surdeanu, Radu; De Meyer, Kristin (2004-04)

Channel engineering towards a full low temperature process solution for the 45 nm technology node

Severi, Simone; Henson, Kirklen; Lindsay, Richard; Pawlak, Bartek; De Meyer, Kristin (2004)

Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications

Veloso, Anabela; Van Dal, Mark; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Redolfi, Augusto; Brus, Stephan; Duffy, Ray; Pawlak, Bartek; Vellianitis, Georgios; Duriez, Blandine; Merelle, Thomas; Absil, Philippe; Biesemans, Serge; Jurczak, Gosia; Hoffmann, Thomas Y.; Lander, Rob (2009-10)