Browsing by author "Pawlak, Bartek"
Now showing items 21-40 of 87
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CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges
Dachs, Charles; Surdeanu, Radu; Pawlak, Bartek; Doornbos, Gerben; Duffy, R.; Heringa, Anco; Ponomarev, Youri; Venezia, Vincent; Van Dal, Mark; Stolk, P.; Lindsay, Richard; Henson, Kirklen; Dieu, B.; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried; Pagès, Xavier (2003) -
Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation
Collart, E.H.; Felch, S.B.; Graoui, H.; Kirkwood, D.; Pawlak, Bartek; Absil, Philippe; Severi, Simone; Janssens, Tom; Vandervorst, Wilfried (2005) -
Conformal doping for FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008) -
Conformal doping of FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Jurczak, Gosia; Pawlak, Bartek; Duffy, Ray (2008) -
Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Cristiano, F.; Claverie, A.; Duffy, Ray; Pawlak, Bartek; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C. (2004) -
Demonstration of Package Level 3D-printed Direct Jet Impingement Cooling applied to High power, Large Die Applications
Wei, Tiwei; Oprins, Herman; Cherman, Vladimir; Yang, Z.; Rivera, K.; Van der Plas, Geert; Pawlak, Bartek; England, L.; Beyne, Eric; Baelmans, M. (2020) -
Development and analysis of small area high efficiency interdigitated back contact silicon solar cells
Posthuma, Niels; Robbelein, Jo; Singh, Sukhvinder; Debucquoy, Maarten; Aleman, Monica; Wostyn, Kurt; Pawlak, Bartek; Loozen, Xavier; Fernandez, Jara; Baert, Kris; Verlinden, Pierre; Poortmans, Jef (2012) -
Development and Integration of a high efficiency baseline leading to 23% IBC cells
Aleman, Monica; Das, Jo; Janssens, Tom; Pawlak, Bartek; Posthuma, Niels; Robbelein, Jo; Singh, Sukhvinder; Baert, Kris; Poortmans, Jef; Fernandez, Jara; Yoshikawa, Kunta; Verlinden, P.J. (2012) -
Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices
Severi, Simone; Kottantharayil, Anil; Pawlak, Bartek; Duffy, Ray; Henson, K.; Lindsay, R.; Lauwers, Anne; Veloso, Anabela; de Marneffe, Jean-Francois; Ramos, Javier; Sijmus, Bram; Devriendt, Katia; Camillo-Castillo, A.; Eyben, Pierre; Vandervorst, Wilfried; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin (2004) -
Doping strategies for FinFETs
Pawlak, Bartek; Duffy, Ray; De Keersgieter, An (2008) -
Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Rooyackers, Rita; Augendre, Emmanuel; Degroote, Bart; Collaert, Nadine; Nackaerts, Axel; Dixit, Abhisek; Vandeweyer, Tom; Pawlak, Bartek; Ercken, Monique; Kunnen, Eddy; Dilliway, Gabriela; Leys, Frederik; Loo, Roger; Jurczak, Gosia; Biesemans, Serge (2007) -
Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
Pawlak, Bartek; Duffy, Ray; Janssens, Tom; Vandervorst, Wilfried; Severi, Simone; Richard, Olivier; Benedetti, Alessandro; Eyben, Pierre; Colombeau, B.; Cowern, N.E.B.; Camillo-Castillo, R.A.; Jones, K.S.; Aboy, M. (2005) -
Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations
Camillo-Castillo, Renata; Law, M.E.; Lindsay, Richard; Maex, Karen; Pawlak, Bartek; McCoy, S. (2005) -
Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth
Pawlak, Bartek; Vandervorst, Wilfried; Smith, A.J.; Cowern, Nick E.B.; Colombeau, B.; Pagès, Xavier (2005) -
Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Pawlak, Bartek; Surdeanu, Radu; Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Lindsay, Richard; Vandervorst, Wilfried; Brijs, Bert; Richard, Olivier; Cristiano, F. (2004) -
Experimental and Numerical Study of 3-D Printed Direct Jet Impingement Cooling for High-Power, Large Die Size Applications
Wei, Tiwei; Oprins, Herman; Cherman, Vladimir; Yang, Zhi; Rivera, Kathryn C.; Van der Plas, Geert; England, Luke; Baelmans, Martine; Pawlak, Bartek; Beyne, Eric (2021) -
Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, R. G. R.; Vandervorst, Wilfried (2010) -
Experimental studies of dose retention and activation in FinFet-based structures
Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, Robbert; Vandervorst, Wilfried (2009) -
First observation of FinFET specific mismatch behavior and optimization guidelines for SRAM scaling
Merelle, Thomas; Curatola, Gilberto; Nackaerts, Axel; Collaert, Nadine; Van Dal, Mark; Doornbos, Gerben; Doorn, T.S.; Christie, Phillip; Vellianitis, Georgios; Duriez, Blandine; Duffy, Ray; Pawlak, Bartek; Voogt, F.C.; Rooyackers, Rita; Witters, Liesbeth; Jurczak, Gosia; Lander, Rob (2008)