Browsing by author "Duffy, Ray"

Advanced FinFET devices for sub-32nm technology nodes: characteristics and integration challenges

Veloso, Anabela; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Van Dal, Mark; Duffy, Ray; Pawlak, Bartek; Lander, Rob; Hoffmann, Thomas Y. (2009)

Arsenic junction thermal stability and high-dose boron-pocket activation during SPER in nMOS transistors

Severi, Simone; Pawlak, Bartek; Duffy, Ray; Augendre, Emmanuel; Henson, Kirklen; Lindsay, Richard; De Meyer, Kristin (2007)

Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

Pelaz, L.; Duffy, Ray; Aboy, M.; Marques, L.; Lopez, P.; Santos, I.; Pawlak, Bartek; Van Dal, Mark; Duriez, Blandine; Merelle, Thomas; Doornbos, Gerben; Collaert, Nadine; Witters, Liesbeth; Rooyackers, Rita; Vandervorst, Wilfried; Jurczak, Gosia; Kaiser, M.; Weemaes, R.; Van Berkum, J.; Breimer, P.; Lander, Rob (2008)

Carbon-based thermal stabilization techniques for junction and silicide engineering for high performance CMOS periphery in memory applications

Ortolland, Claude; Mathew, Suraj; Duffy, Ray; Saino, Kanta; Kim, Chul Sung; Mertens, Sofie; Horiguchi, Naoto; Vrancken, Christa; Chiarella, Thomas; Kerner, Christoph; Absil, Philippe; Lauwers, Anne; Biesemans, Serge; Hoffmann, Thomas Y. (2009)

Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications

Veloso, Anabela; Van Dal, Mark; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Redolfi, Augusto; Brus, Stephan; Duffy, Ray; Pawlak, Bartek; Vellianitis, Georgios; Duriez, Blandine; Merelle, Thomas; Absil, Philippe; Biesemans, Serge; Jurczak, Gosia; Hoffmann, Thomas Y.; Lander, Rob (2009-10)

Chemical and electrical dopant evolution during solid phase epitaxial regrowth

Pawlak, Bartek; Lindsay, Richard; Vandervorst, Wilfried; Kittl, Jorge; Surdeanu, Radu; Duffy, Ray; Stolk, P. (2003)

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Pawlak, Bartek; Lindsay, Richard; Surdeanu, Radu; Dieu, Bjorn; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Duffy, Ray; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried (2004)

CMOS device optimisation for mixed-signal technologies

Stolk, Peter; Tuinhout, Hans; Duffy, Ray; Augendre, Emmanuel; Bellefroid, L. P.; Bolt, M. J. B.; Croon, Jeroen; Dachs, Charles; Huisman, F. R. J.; Moonen, A. J.; Ponomarev, Youri; Roes, R. F. M.; Da Rold, Martina; Seevinck, E.; Sreerambhatla, K. N.; Surdeanu, Radu; Velghe, Rudolf; Vertregt, M.; Webster, M. N.; van Winkelhoff, N. K. J.; Zegers-Van Duijnhoven, A. T. A. (2001)

Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008)

Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Eyben, Pierre; Jurczak, Gosia; Pawlak, Bartek; Duffy, Ray (2008)

Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions

Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Cristiano, F.; Claverie, A.; Duffy, Ray; Pawlak, Bartek; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C. (2004)

Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices

Severi, Simone; Kottantharayil, Anil; Pawlak, Bartek; Duffy, Ray; Henson, K.; Lindsay, R.; Lauwers, Anne; Veloso, Anabela; de Marneffe, Jean-Francois; Ramos, Javier; Sijmus, Bram; Devriendt, Katia; Camillo-Castillo, A.; Eyben, Pierre; Vandervorst, Wilfried; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin (2004)

Doping strategies for FinFETs

Pawlak, Bartek; Duffy, Ray; De Keersgieter, An (2008)

Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate

Pawlak, Bartek; Duffy, Ray; Janssens, Tom; Vandervorst, Wilfried; Severi, Simone; Richard, Olivier; Benedetti, Alessandro; Eyben, Pierre; Colombeau, B.; Cowern, N.E.B.; Camillo-Castillo, R.A.; Jones, K.S.; Aboy, M. (2005)

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, R. G. R.; Vandervorst, Wilfried (2010)

Experimental studies of dose retention and activation in FinFet-based structures

Mody, Jay; Duffy, Ray; Eyben, Pierre; Goossens, Jozefien; Moussa, Alain; Polspoel, Wouter; Berghmans, Bart; Van Dal, Mark; Pawlak, Bartek; Kaiser, Monja; Weemaes, Robbert; Vandervorst, Wilfried (2009)

First observation of FinFET specific mismatch behavior and optimization guidelines for SRAM scaling

Merelle, Thomas; Curatola, Gilberto; Nackaerts, Axel; Collaert, Nadine; Van Dal, Mark; Doornbos, Gerben; Doorn, T.S.; Christie, Phillip; Vellianitis, Georgios; Duriez, Blandine; Duffy, Ray; Pawlak, Bartek; Voogt, F.C.; Rooyackers, Rita; Witters, Liesbeth; Jurczak, Gosia; Lander, Rob (2008)

Gatestacks for scalable high-performance FinFETs

Vellianitis, Georgios; Van Dal, Mark; Witters, Liesbeth; Curatola, Gilberto; Doornbos, Gerben; Collaert, Nadine; Jonville, C.; Torregiani, Cristina; Lai, Li-Shyue; Petry, Jasmine; Pawlak, Bartek; Duffy, Ray; Demand, Marc; Beckx, Stephan; Mertens, Sofie; Delabie, Annelies; Vandeweyer, Tom; Delvaux, Christie; Leys, Frederik; Hikavyy, Andriy; Rooyackers, Rita; Kaiser, M.; Weemaes, R.G.R.; Voogt, F.; Roberts, H.; Donnet, D.; Biesemans, Serge; Jurczak, Gosia; Lander, Rob (2007)

Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography

Van Dal, Mark; Collaert, Nadine; Doornbos, Gerben; Vellianitis, Georgios; Curatola, Gilberto; Pawlak, Bartek; Duffy, Ray; Jonville, Carole; Degroote, Bart; Altamirano Sanchez, Efrain; Kunnen, Eddy; Demand, Marc; Beckx, Stephan; Vandeweyer, Tom; Delvaux, Christie; Leys, Frederik; Hikavyy, Andriy; Rooyackers, Rita; Kaiser, M.; Weemaes, R.G.R.; Biesemans, Serge; Jurczak, Gosia; Kottantharayil, Anil; Witters, Liesbeth; Lander, Rob (2007)

Improved fin width scaling in fully-depleted FinFETs

Duffy, Ray; Van Dal, Mark; Pawlak, Bartek; Collaert, Nadine; Witters, Liesbeth; Rooyackers, Rita; Kaiser, M.; Weemaes, R. G. R.; Jurczak, Gosia; Lander, Rob (2008)