Browsing by author "Janssens, Tom"
Now showing items 1-20 of 110
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(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
Accurate electrical activation characterization of CMOS ultra-shallow profiles
Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I. (2004) -
Acoustic cleaning in nano-electronics
Mertens, Paul; Janssens, Tom; Holsteyns, Frank; Zijlstra, Aaldert; Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Hoyer, Ronald; Barbagini, Francesca; Wada, Masayuki; Franklin, Cole; Kim, Tae-Gon; Kim, K; Kenis, Karine; Le, Quoc Toan; Claes, Martine; Kesters, Els; Vos, Rita; Vereecke, Guy; Bearda, Twan; Heyns, Marc (2008) -
Active dopant characterization methodology for Germanium
Clarysse, Trudo; Eyben, Pierre; Janssens, Tom; Hoflijk, Ilse; Vanhaeren, Danielle; Satta, Alessandra; Meuris, Marc; Vandervorst, Wilfried (2005) -
Advanced phosphorus emitters for high efficiency Si solar cells
Janssens, Tom; Posthuma, Niels; Van Kerschaver, Emmanuel; Baert, Kris; Choulat, Patrick; Everaert, Jean-Luc; Goossens, Jozefien; Vandervorst, Wilfried; Poortmans, Jef (2009) -
Advanced phosphorus emitters for high efficiency Si solar cells
Janssens, Tom; Posthuma, Niels; Van Kerschaver, Emmanuel; Baert, Kris; Choulat, Patrick; Goossens, Jozefien; Vandervorst, Wilfried; Poortmans, Jef (2009) -
An (un)solvable problem in SIMS: B-interfacial profiling
Vandervorst, Wilfried; Janssens, Tom; Loo, Roger; Caymax, Matty; Peytier, Ivan; Lindsay, Richard; Fruehauf, Jens; Bergmaier, A.; Dollinger, G. (2003) -
An integrated approach for selective emitter formation
Allebe, Christophe; Tous, L.; Vermang, Bart; Janssens, Tom; Choulat, Patrick; John, Joachim; Posthuma, Niels; Van Kerschaver, Emmanuel (2009) -
Assessment of the near-surface profiling capabilities of SIMS
Vandervorst, Wilfried; Janssens, Tom; Fruehauf, Jens; Ross, I.M.; Cullis, A.; Vandenberg, J.A.; Bergmaier, A.; Dollinger, G. (2003) -
Athermal germanium migration in strained silicon layers during junction formation with solid-phase epitaxial regrowth
Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Loo, Roger; Caymax, Matty; Pawlak, Bartek; Posselt, Matthias (2005) -
Characterization and otimalization of 65nm CMOS technology using scanning spreading resistance microscopy
Eyben, Pierre; De Keersgieter, An; Chramtsov, I.; Fouchier, M.; Janssens, Tom; Vandervorst, Wilfried (2005) -
Characterization of (ultra)thin dielectrica
Vandervorst, Wilfried; De Witte, Hilde; Conard, Thierry; Janssens, Tom; Schaekers, Marc; Brijs, Bert; Houssa, Michel (2000) -
Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation
Collart, E.H.; Felch, S.B.; Graoui, H.; Kirkwood, D.; Pawlak, Bartek; Absil, Philippe; Severi, Simone; Janssens, Tom; Vandervorst, Wilfried (2005) -
Correlation between optical and physical depth measurements: errors related to transparent layers
Janssens, Tom; Vandervorst, Wilfried (2001) -
Damage clustering and damage-size distributions after megasonic cleaning
De Marco, Cinzia; Wostyn, Kurt; Bearda, Twan; Sano, Ken-Ichi; Kenis, Karine; Janssens, Tom; Leunissen, Peter; Eitoku, Atsuro; Mertens, Paul (2007) -
Damage review on gate stack test structures after high-velocity aerosol cleaning
Wostyn, Kurt; Sano, Ken-Ichi; De Marco, Cinzia; Kenis, Karine; Van Den Heuvel, Dieter; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul; Eitoku, Atsuro (2007) -
Defect removal, dopant diffusion and activation issues in ion-implanted shallow junctions fabricated in crystalline germanium substrates
Simoen, Eddy; Satta, Alessandra; Meuris, Marc; Janssens, Tom; Clarysse, Trudo; Benedetti, Alessandro; Demeurisse, Caroline; Brijs, Bert; Hoflijk, Ilse; Vandervorst, Wilfried; Claeys, Cor (2005) -
Development and Integration of a high efficiency baseline leading to 23% IBC cells
Aleman, Monica; Das, Jo; Janssens, Tom; Pawlak, Bartek; Posthuma, Niels; Robbelein, Jo; Singh, Sukhvinder; Baert, Kris; Poortmans, Jef; Fernandez, Jara; Yoshikawa, Kunta; Verlinden, P.J. (2012) -
Development of high effciency FZ silicon solar cells by application of the i-PERC concept
Posthuma, Niels; Janssens, Tom; Van Kerschaver, Emmanuel; Choulat, Patrick; Loozen, Xavier; Ma, Yue; John, Joachim; Beaucarne, Guy; Poortmans, Jef (2008)