Browsing Conference contributions by author "O'Connor, Robert"
Now showing items 1-16 of 16
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A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
Chang, Vincent; Ragnarsson, Lars-Ake; Pourtois, Geoffrey; O'Connor, Robert; Adelmann, Christoph; Van Elshocht, Sven; Delabie, Annelies; Swerts, Johan; Van der Heyden, Nikolaas; Conard, Thierry; Cho, Hag-Ju; Akheyar, Amal; Mitsuhashi, Riichirou; Witters, Thomas; O'Sullivan, Barry; Pantisano, Luigi; Rohr, Erika; Lehnen, Peer; Kubicek, Stefan; Schram, Tom; De Gendt, Stefan; Absil, Philippe; Biesemans, Serge (2007) -
Anomalous positive-bias temperature instability of high-k/metal gate nMOSFET devices with Dy2O3 capping
O'Connor, Robert; Chang, Vincent; Pantisano, Luigi; Ragnarsson, Lars-Ake; Aoulaiche, Marc; O'Sullivan, Barry; Adelmann, Christoph; Van Elshocht, Sven; Lehnen, Peer; Yu, HongYu; Groeseneken, Guido (2008) -
Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures
Sahhaf, Sahar; Degraeve, Robin; O'Connor, Robert; Kaczer, Ben; Zahid, Mohammed; Roussel, Philippe; Pantisano, Luigi; Groeseneken, Guido (2009) -
Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films
Kaczer, Ben; Degraeve, Robin; O'Connor, Robert; Roussel, Philippe; Groeseneken, Guido (2004-12) -
Methodologies for sub-1nm EOT TDDB evaluatiion
Kauerauf, Thomas; Degraeve, Robin; Ragnarsson, Lars-Ake; Roussel, Philippe; Sahhaf, Sahar; Groeseneken, Guido; O'Connor, Robert (2011) -
Oxygen-vacancy-induced Vt shift in La-containing devices
O'Sullivan, Barry; Mitsuhashi, Riichirou; Pourtois, Geoffrey; Chang, Vincent; Adelmann, Christoph; Schram, Tom; Ragnarsson, Lars-Ake; Van der Heyden, Nikolaas; Cho, Hag-Ju; Harada, Y.; Veloso, Anabela; O'Connor, Robert; Pantisano, Luigi; Yu, HongYu; Groeseneken, Guido; Absil, Philippe; Biesemans, Serge; Ikeda, Atsushi; Niwa, Masaaki (2007) -
SILC defect generation spectroscopy in HfSiON using constant voltage stress and substrate hot electron injection
O'Connor, Robert; Pantisano, Luigi; Degraeve, Robin; Kauerauf, Thomas; Kaczer, Ben; Roussel, Philippe; Groeseneken, Guido (2008) -
Simultaneous extraction of recoverable and permanent components contributing to bias-temperature instability
Grasser, T.; Kaczer, Ben; Hehenberger, P.; Gös, W.; O'Connor, Robert; Reisinger, H.; Gustin, W.; Schlünder, C. (2007) -
Stress induced defect generation implications of doping HfO2 with Al
O'Connor, Robert; Kauerauf, Thomas; Arimura, Hiroaki; Ragnarsson, Lars-Ake (2013) -
The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
Brady-Boyle, Anita; O'Connor, Robert; Armini, Silvia; Selvaraju, V; Bogan, Justin (2019) -
The role of nitrogen in HfSiON defect passivation
O'Connor, Robert; Aoulaiche, Marc; Pantisano, Luigi; Shickova, Adelina; Degraeve, Robin; Kaczer, Ben; Groeseneken, Guido (2009-04) -
Time dependent dielectric breakdown and stress induced leakage current characteristics of 8 Å EOT HfO2 n-MOSFETs
O'Connor, Robert; Kauerauf, Thomas; Ragnarsson, Lars-Ake; Hughes, Greg (2010) -
Trapping in 1nm EOT high-k / MG
Zahid, Mohammed; Pantisano, Luigi; Degraeve, Robin; Aoulaiche, Marc; Trojman, Lionel; Ferain, Isabelle; san andres, e; Shickova, Adelina; O'Connor, Robert; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan (2008) -
Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer
Petry, Jasmine; Singanamalla, Raghunath; Xiong, K.; Ravit, C.; Simoen, Eddy; O'Connor, Robert; Veloso, Anabela; Adelmann, Christoph; Van Elshocht, Sven; Paraschiv, Vasile; Brus, Stephan; Van Berkum, J.; Kubicek, Stefan; De Meyer, Kristin; Biesemans, Serge; Hooker, Jacob (2007) -
Ubiquitous relaxation in BTI stressing - new evaluation and insights
Kaczer, Ben; Grasser, Tibor; Roussel, Philippe; Martin-Martinez, Javier; O'Connor, Robert; O'Sullivan, Barry; Groeseneken, Guido (2008-04) -
Ultra-thin oxynitride gate dielectrics by pulsed-RF DPN for 65 nm general purpose CMOS applications
Veloso, Anabela; Cubaynes, Florence; Rothschild, Aude; Mertens, Sofie; Degraeve, Robin; O'Connor, Robert; Olsen, Chris; Date, Lucien; Schaekers, Marc; Dachs, Charles; Jurczak, Gosia (2003)