Browsing Conference contributions by author "Pacco, Antoine"
Now showing items 1-20 of 42
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A study of nanoparticle removal on patterned surfaces
Pacco, Antoine; Holsteyns, Frank; De Gendt, Stefan (2013) -
A year of new mask defectivity insights in imec's EUVL program
Jonckheere, Rik; Van Den Heuvel, Dieter; Baudemprez, Bart; Jehoul, Christiane; Pacco, Antoine (2013) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Buried Power Rail Metal exploration towards the 1 nm Node
Gupta, Anshul; Radisic, Dunja; Maes, J.W.; Varela Pedreira, Olalla; Soulie, Jean-Philippe; Jourdan, Nicolas; Mertens, Hans; Bandyopadhyay, Sudip; Le, Quoc Toan; Pacco, Antoine; Heylen, Nancy; Vandersmissen, Kevin; Devriendt, Katia; Zhu, C.; Datta, S.; Sebaai, Farid; Wang, S.; Mousa, M.; Lee, J.; Geypen, Jef; De Wachter, Bart; Chehab, Bilal; Salahuddin, Shairfe Muhammad; Murdoch, Gayle; Biesemans, Serge; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Challenges and novel approaches for photo resist removal and post-etch residue removal for 22 nm interconnects
Mertens, Paul; Kim, Tae-Gon; Claes, Martine; Le, Quoc Toan; Vereecke, Guy; Kesters, Els; Suhard, Samuel; Pacco, Antoine; Lux, Marcel; Kenis, Karine; Urbanowicz, Adam; Tokei, Zsolt; Beyer, Gerald (2009) -
Challenges in uniform etching of Ruthenium
Le, Quoc Toan; Verdonck, Patrick; Pacco, Antoine; Altamirano Sanchez, Efrain (2021) -
Cleaning and damage performance of single wafer cleaning tools using physcial removal forces
Pacco, Antoine; Halder, Sandip; Kenis, Karine; Bearda, Twan; Mertens, Paul (2009) -
Cleaning and damage performance of single wafer cleaning tools using physical removal forces
Pacco, Antoine; Halder, Sandip; Kenis, Karine; Bearda, Twan; Mertens, Paul (2009) -
Cleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication.
Pacco, Antoine; Le, Quoc Toan; Akanishi, Yuya; Altamirano Sanchez, Efrain (2020) -
Controlled ALE-type recess of molybdenum for future logic and memory applications
Pacco, Antoine; Nakano, Teppei; Iwasaki, Akihisa; Iwahata, Shota; Altamirano Sanchez, Efrain (2021) -
Controlled and Uniform Wet Etching of Molybdenum Nanowires
Deng, Kerong; Erofeev, Ivan; Ray Chowdhuri, Angshuman; Saidov, Khakimjon; Aabdin, Zainul; Pacco, Antoine; Philipsen, Harold; Holsteyns, Frank; Vinh Huynh, Han; Mirsaidov, Utkur (2023-09) -
Controlled cobalt recess for advanced interconnect metallization
Pacco, Antoine; Akanishi, Yuya; Murdoch, Gayle; Le, Quoc Toan; Holsteyns, Frank (2019) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Vos, Rita; Mertens, Paul (2009) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Mertens, Paul; Vos, Rita (2009) -
Development of a wet silicon removal process for replacement metal gate and sacrificial fin
Suhard, Samuel; Sebaai, Farid; Pacco, Antoine; Veloso, Anabela; Carbonell, Laure; Claes, Martine; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan (2011) -
Development of a wet silicon removal process for replacement metal gate and sacrificial fin
Suhard, Samuel; Sebaai, Farid; Pacco, Antoine; Veloso, Anabela; Carbonell, Laure; Claes, Martine; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan (2011) -
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Pacco, Antoine; Bearda, Twan; Mertens, Paul; Wada, Masayuki (2008) -
Dummy oxide removal in high-K last process integration how to avoid silicon corrosion issue
Sebaai, Farid; Veloso, Anabela; Takahashi,; Pacco, Antoine; Claes, Martine; Schaekers, Marc; De Gendt, Stefan; Mertens, Paul; Struyf, Herbert (2013) -
Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Ogawa, Yuichi; Wostyn, Kurt; Pacco, Antoine; Yoshida, Yukifuni; Holsteyns, Frank (2016) -
Effects of interfacial strength and dimension of structures on physical cleaning window
Kim, Tae-Gon; Pacco, Antoine; Wostyn, Kurt; Xu, XiuMei; Struyf, Herbert; Arstila, Kai; Park, Jin-Goo; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (2010)