Browsing Conference contributions by imec author "a62c69c3a7e310de5b19d9226496e4649a07d978"
Now showing items 21-40 of 176
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A silicon photonics platform with heterogeneous III-V integration
Bogaerts, Wim; Selvaraja, Shankar; Yu, Hui; Spuesens, Thijs; Mechet, Pauline; Stankovic, Stevan; Keyvaninia, Shahram; Van Campenhout, Joris; Absil, Philippe; Roelkens, Gunther; Van Thourhout, Dries; Baets, Roel (2011) -
Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT
Rothschild, Aude; Shi, Xiaoping; Everaert, Jean-Luc; Kerner, Christoph; Chiarella, Thomas; Hoffmann, Thomas; Vrancken, Christa; Shickova, Adelina; Yoshinao, H.; Mitsuhashi, Riichirou; Niwa, Masaaki; Lauwers, Anne; Veloso, Anabela; Kittl, Jorge; Absil, Philippe; Biesemans, Serge (2007) -
Achieving low VT Ni-FUSI CMOS via lanthanide incorporation in the gate stack
Veloso, Anabela; Yu, HongYu; Lauwers, Anne; Chang, Shou-Zen; Adelmann, Christoph; Onsia, Bart; Demand, Marc; Brus, Stephan; Vrancken, Christa; Singanamalla, Raghunath; Lehnen, Peer; Kittl, Jorge; Kauerauf, Thomas; Vos, Rita; O'Sullivan, Barry; Van Elshocht, Sven; Mitsuhashi, Riichirou; Whittemore, G.; Yin, K.M.; Niwa, Masaaki; Hoffmann, Thomas; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2007-09) -
Addressing key concerns for implementation of Ni FUSI into manufacturing for 45/32 nm CMOS
Shickova, Adelina; Kauerauf, Thomas; Rothschild, Aude; Aoulaiche, Marc; Sahhaf, Sahar; Kaczer, Ben; Veloso, Anabela; Torregiani, Cristina; Pantisano, Luigi; Lauwers, Anne; Zahid, Mohammed; Rost, Tim; Tigelaar, H.; Pas, M.; Fretwell, J.; McCormack, J.; Hoffmann, Thomas; Kerner, Christoph; Chiarella, Thomas; Brus, Stephan; Harada, Yoshinao; Niwa, Masaaki; Kaushik, Vidya; Maes, Herman; Absil, Philippe; Groeseneken, Guido; Biesemans, Serge; Kittl, Jorge (2007) -
Advanced 2D/3D simulations for laser annealed device using an atomic kinetic monte carlo approach and scanning spreading resistance microscopy (SRRM)
Noda, T.; Eyben, Pierre; Vandervorst, Wilfried; Vrancken, Christa; Rosseel, Erik; Ortolland, Claude; Clarysse, Trudo; Goossens, Jozefien; De Keersgieter, An; Felch, S.; Schreutelkamp, Rob; Absil, Philippe; Jurczak, Gosia; De Meyer, Kristin; Biesemans, Serge; Hoffmann, Thomas Y. (2008) -
Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors
Selvaraja, Shankar; Murdoch, Gayle; Milenin, Alexey; Delvaux, Christie; Ong, Patrick; Pathak, Shibnath; Vermeulen, Diedrik; Sterckx, Gunther; Winroth, Gustaf; Verheyen, Peter; Lepage, Guy; Bogaerts, Wim; Baets, Roel; Van Campenhout, Joris; Absil, Philippe (2012) -
Advanced USJ for high-k / metal gate CMOS devices
Absil, Philippe; Ortolland, Claude; Aoulaiche, Marc; Rosseel, Erik; Verheyen, Peter; Vrancken, Christa; Horiguchi, Naoto; Noda, Tajii; Felch, Susan; Schreutelkamp, Rob; Hoffmann, Thomas Y. (2008) -
Advances in silicon photonics WDM devices
Absil, Philippe; De Heyn, Peter; Dumon, Pieter; Van Thourhout, Dries; Verheyen, Peter; Selvaraja, Shankar; Lepage, Guy; Pantouvaki, Marianna; Rakowski, Michal; Van Campenhout, Joris (2014) -
An ultra-short InP nanowire laser monolithic integrated on (001) silicon substrate
Wang, Zhechao; Tian, Bin; Paladugu, Mohan; Pantouvaki, Marianna; Merckling, Clement; Guo, Weiming; Dekoster, Johan; Caymax, Matty; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries (2013) -
Analysis of As, P diffusion and defect evolution during sub-millisecond non-melt laser annealing based on an atomistic kinetic Monte Carlo approach
Noda, Taiji; Vandervorst, Wilfried; Felch, S.; Parihar, V.; Cuperus, Aldert; Mcintosh, R.; Vrancken, Christa; Rosseel, Erik; Bender, Hugo; Van Daele, Benny; Niwa, Masaaki; Umimoto, H.; Schreutelkamp, Rob; Absil, Philippe; Jurczak, Gosia; De Meyer, Kristin; Biesemans, Serge; Hoffmann, Thomas Y. (2007) -
Analysis of copper plasticity impact in TSV-middle and backside TSV-last fabrication processes
Guo, Wei; Karmarkar, Aditya; Xu, Xiaopeng; Van der Plas, Geert; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Absil, Philippe; El Sayed, Karim; Beyne, Eric (2015) -
Analysis of pocket profile deactivation and its impact on Vth variation for laser annealed device using an atomistic kinetic Monte Carlo approach
Noda, Taichi; Vandervorst, Wilfried; Vrancken, Christa; Ortolland, Claude; Rosseel, Erik; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y. (2010) -
Broadband 10Gb/s graphene electro-absorption modulator on silicon for chip-level optical interconnects
Hu, Yingto; Pantouvaki, Marianna; Brems, Steven; Asselberghs, Inge; Huyghebaert, Cedric; Geisler, Matthias; Alessandri, Chiara; Baets, Roel; Absil, Philippe; Van Thourhout, Dries; Van Campenhout, Joris (2014) -
Broadband, polarization-insensitive lensed edge couplers for silicon photonics
Snyder, Brad; Lepage, Guy; Balakrishnan, Sadhishkumar; Verheyen, Peter; Pantouvaki, Marianna; Absil, Philippe; Van Campenhout, Joris (2018) -
Carbon-based thermal stabilization techniques for junction and silicide engineering for high performance CMOS periphery in memory applications
Ortolland, Claude; Mathew, Suraj; Duffy, Ray; Saino, Kanta; Kim, Chul Sung; Mertens, Sofie; Horiguchi, Naoto; Vrancken, Christa; Chiarella, Thomas; Kerner, Christoph; Absil, Philippe; Lauwers, Anne; Biesemans, Serge; Hoffmann, Thomas Y. (2009) -
Carrier lifetime assessment in integrated Ge waveguide devices
Srinivasan, Ashwyn; Pantouvaki, Marianna; Verheyen, Peter; Lepage, Guy; Absil, Philippe; Van Campenhout, Joris; Van Thourhout, Dries (2015) -
Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications
Veloso, Anabela; Van Dal, Mark; Collaert, Nadine; De Keersgieter, An; Witters, Liesbeth; Rooyackers, Rita; Redolfi, Augusto; Brus, Stephan; Duffy, Ray; Pawlak, Bartek; Vellianitis, Georgios; Duriez, Blandine; Merelle, Thomas; Absil, Philippe; Biesemans, Serge; Jurczak, Gosia; Hoffmann, Thomas Y.; Lander, Rob (2009-10) -
Characteristics of Selective Epitaxial SiGe and Si Deposition processes for recessed source/drain applications
Loo, Roger; Verheyen, Peter; Eneman, Geert; Rooyackers, Rita; Leys, Frederik; Shamiryan, Denis; De Meyer, Kristin; Absil, Philippe; Caymax, Matty (2005) -
Characteristics of selective epitaxial SiGe deposition processes for recesssed source/drain applications
Loo, Roger; Verheyen, Peter; Eneman, Geert; Rooyackers, Rita; Leys, Frederik; Shamiryan, Denis; De Meyer, Kristin; Absil, Philippe; Caymax, Matty (2005) -
CMOS compatible heater fabrication approaches for thermal tuning of photonics devices
Masood, Adil; Pantouvaki, Marianna; Goossens, Danny; Lepage, Guy; Verheyen, Peter; Van Thourhout, Dries; Absil, Philippe; Bogaerts, Wim (2012)